以ZnO纳米粉(平均粒径30 nm)和Fe2O3,纳米粉(平均粒径90 nm)为原料,利用传统的厚膜气敏传感器制备工艺,制备了纯ZnO多孔纳米固体厚膜气敏传感器和掺杂Fe2O3(掺杂量为1wt%,2wt%和5wt%)的ZnO厚膜气敏传感器.分别测试了这四种厚膜气敏传感器的本征电阻(传感器在空气中的电阻值)及其对乙醇,汽油,丙酮,对二甲苯,氢气,甲烷和CO敏感特性.结果表明:当工作温度在较低时,Fe2O13,的掺杂可明显降低ZnO多孔纳米固体厚膜气敏传感器的本征电阻,并提高其工作稳定性,而适量Fe2O3的掺杂可以提高ZnO多孔纳米固体厚膜气敏传感器对乙醇蒸气和汽油的灵敏度.结合对传感器厚膜的显微结构分析结果,我们对出现上述差异的原因进行了初步讨论.
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