基于WO3薄膜的双声路声表面波型SO2气体传感器

功能材料与器件学报 , 2009, 15(1): 1-6. doi: 10.3969/j.issn.1007-4252.2009.01.001

基于WO3薄膜的双声路声表面波型SO2气体传感器

文常保 ^1, , 朱长纯 ^2, , 巨永锋 ^3, , 邱彦章 ^4, , 许宏科 ^5, , 胡小东 ^6, , 吴媛 ^7, , 刘君华 ^8,

1.长安大学电子与控制工程学院,西安,710064;西安交通大学电子与信息工程学院,西安,710049

2.西安交通大学电子与信息工程学院,西安,710049

3.长安大学电子与控制工程学院,西安,710064

4.长安大学电子与控制工程学院,西安,710064

5.长安大学电子与控制工程学院,西安,710064

6.西安交通大学电子与信息工程学院,西安,710049

7.西安交通大学电子与信息工程学院,西安,710049

8.西安交通大学电子与信息工程学院,西安,710049

基金项目: 教育部高等学校博士学科点专项科研基金(20020698014) 国家自然科学基金(60176020;60476037)

关键词：声表面波器件 , WO3薄膜 , SO2气体 , 传感器 , PVP

Dual track surface acoustic wave SO2 gas sensor based on WO3 films

以金属钨粉,H2O2,CH3OH和PVP(聚乙烯吡咯烷酮)为原料,利用热喷射方法在双声路声表面波器件的测量声路上制作了细微多网孔状WO3薄膜,提出并实现了一种在常温下可以实现对二氧化硫(SO2)气体进行物理吸附和解吸附的基于WO3薄膜的双声路声表面波型SO2气体传感器.声表面波器件的双声路结构消除了由于外界测量条件改变引起的测量误差,也进一步提高了传感器的可靠性和准确性.实验结果表明,该传感器具有好的重复性,在测量范围内对各种浓度的SO2气体具有好的响应特性;传感器在0.5ppm到20ppm浓度范围内的线性灵敏度大约为6.8KHz/ppm.

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