采用真空蒸发法在玻璃衬底上制备稀土Dy掺杂Sn薄膜,对薄膜进行合适的氧化、热处理后获得Dy掺杂SnO2薄膜.用X射线衍射、场发射扫描电子显微镜、静态配气法对薄膜性能进行测试,研究不同掺Dy含量和热处理条件对SnO2薄膜的影响.结果显示,制备的SnO2薄膜呈金红石结构为n型;在相同热处理条件下,Dy掺杂可明显缩短薄膜氧化、热处理的时间;适当掺入稀土Dy可明显改善SnO2薄膜的结构、气敏特性.掺Dy 3at%后可大大提高SnO2薄膜对丙酮气体的灵敏度.
参考文献
| [1] | 王占和,吴海霞,蒋煜婧,邢懋腾,詹杰.纳米晶SnO2薄膜的结晶特性[J].半导体学报,2003(z1):110-113. |
| [2] | Starke TKH.;Coles GSV. .Laser-ablated nanocrystalline SnO2 material for low-level CO detection[J].Sensors and Actuators, B. Chemical,2003(3):227-233. |
| [3] | 杨志华,余萍,肖定全.半导体陶瓷型薄膜气敏传感器的研究进展[J].功能材料,2004(01):4-6,10. |
| [4] | 郝俊杰,李龙土.氢敏元件的种类及半导体薄膜材料在其中的应用[J].功能材料,2004(01):7-10. |
| [5] | Reddy C V G;Manorama S V .Room temperature hydrogen sensor based on SnO2:LaO3[J].Journal of the Electrochemical Society,2000,147(01):390-397. |
| [6] | ZHAO Songqing,ZHOU Yueliang,WANG Shufang,ZHAO Kun,HAN Peng.Effect of ambient oxygen pressure on structural, optical and electrical properties of SnO2 thin films[J].稀有金属(英文版),2006(06):693-696. |
| [7] | 谢莲革,汪建勋,沈鸽,翁文剑,杜丕一,韩高荣.基板温度对SnO2：Sb薄膜结构和性能的影响[J].功能材料,2005(03):411-413,418. |
| [8] | 王磊,杜军,毛昌辉,杨志民,熊玉华.SnO2-x薄膜非化学计量比对气敏性能的影响[J].材料科学与工程学报,2007(01):22-25,51. |
| [9] | Kappler J;Tomescu A;Barsan N .CO consumption of Pd doped SnO2 based sensors[J].Thin Solid Films,2001,391:186-191. |
| [10] | Maffeis TGG.;Owen GT.;Penny MW.;Starke TKH.;Clark SA.;Ferkel H. Wilks SP. .Nano-crystalline SnO2 gas sensor response to O-2 and CH4 at elevated temperature investigated by XPS[J].Surface Science: A Journal Devoted to the Physics and Chemistry of Interfaces,2002(1/2):29-34. |
| [11] | Jong Won Kim;Kwang-Hyun Yunz;Geon-Young Cha .H,S sensing characteristics of thin film SnO2sensor with N2 treatment[J].稀有金属材料与工程,2006,35:384-388. |
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