电阻热效应对力式微固态测风传感器测量精度的影响

1.中国科学院电子学研究所传感器国家重点实验室北京100190;中国科学院研究生院,北京,100190

2.中国科学院电子学研究所传感器国家重点实验室北京100190

3.中国科学院电子学研究所传感器国家重点实验室北京100190;中国科学院研究生院,北京,100190

4.中国科学院电子学研究所传感器国家重点实验室北京100190

5.解放军理工大学气象学院,南京,211101

6.山西省大同市浑源县李峪中学,037400

7.中国科学院电子学研究所传感器国家重点实验室北京100190;中国科学院研究生院,北京,100190

Influence of Resistor Thermal Effect in Wind Measurement Using Micro Solid State Drag Force Wind Sensor

实验结果相符.

[1]	Niklas Svendin;Edvard Kalvesten;Goran Stemme .A lift force sensor with integrated hot-chips for wide range flow measurments[J].Sensors and Actuators A:Physical,2003,109:120-130.
[2]	Niklas Svedin;Edvard Kalvesten;Goran Stemme .A new edge-detected lift force flow sensor[J].Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems,2003(3):344-354.
[3]	Niklas Svendin;Edvard Kalvesten;Goran Stemme.[A].,1997:145-148.
[4]	Svedin N.;Stemme E.;Stemme G.;Kalvesten E. .A new silicon gas-flow sensor based on lift force[J].Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems,1998(3):303-308.
[5]	Fan ZF.;Chen J.;Zou J.;Bullen D.;Liu C.;Delcomyn F. .Design and fabrication of artificial lateral line flow sensors[J].Journal of Micromechanics and Microengineering,2002(5):655-661.
[6]	Jack Chen;Jonathan Engel;Chang Liu.Development of Polymer-based Artificial Haircell Using Surface Micromachining and 3D Assembly[A].Boston,MA,2003:1035-1038.
[7]	M. Laghrouche;A. Adane;J. Boussey;S. Ameur;D. Meunier;S. Tardu .A miniature silicon hot wire sensor for automatic wind speed measurements[J].Renewable energy,2005(12):1881-1896.
[8]	王奇,赵湛,曾欢欢,方震,张博军.基于氮化硅的压力传感器以及算法补偿[J].电子器件,2006(03):726-729.

上一张下一张

计量

作者相关

文章评分