二步热氧化法制备SnO2薄膜的特性

功能材料与器件学报 , 2009, 15(4): 370-374. doi: 10.3969/j.issn.1007-4252.2009.04.011

二步热氧化法制备SnO2薄膜的特性

李栋宇 ^1, , 刘贵昂 ^2, , 潘喜诚 ^3, , 邵乐喜 ^4,

1.湛江师范学院物理科学与技术学院,湛江,524048

2.湛江师范学院物理科学与技术学院,湛江,524048

3.湛江师范学院物理科学与技术学院,湛江,524048

4.湛江师范学院物理科学与技术学院,湛江,524048

基金项目: 湛江师范大学自然科学基金(QL0703) 广东省自然科学基金(31927)

关键词： SnO2薄膜 , 热氧化法 , 蒸发

Characterizations of SnO2 films prepared by two-step thermal oxidization

LI Dong-yu ^1, , LIU Gui-ang ^2, , PAN Xi-cheng ^3, , SHAO Le-xi ^4,

1.湛江师范学院物理科学与技术学院,湛江,524048

2.湛江师范学院物理科学与技术学院,湛江,524048

3.湛江师范学院物理科学与技术学院,湛江,524048

4.湛江师范学院物理科学与技术学院,湛江,524048

Keywords： SnO2 films , thermal oxidization , evaporation

氧化温度有很大的联系.通过UV-VIS透过光谱得知随着氧化温度的升高,SnO2薄膜的光透过率也升高,光学禁带宽度也随着氧化温度的升高而升高.这种制备SnO2薄膜的工艺具有适于大面积制造,低成本,过程容易控制等很多优点.

ique developed in this work also has many advantages than other methods for fabricating SnO2 films, such as easiness in large area fabrication, low-cost, high reliability in control processing.

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