设计制作了一种基于静电力驱动的数字微流芯片.通过优化芯片的结构,采用硅为衬底,TiW/Au为微电极阵列,较薄的氮化硅和碳氟聚合物为介质层和疏水膜层,驱动电压大为降低.目前已成功实现了在30V的驱动电压下,对去离子水液滴的两维驱动,液滴移动速度可达96mm/s,同时也实现了对0.9%质量浓度NaCl溶液液滴的驱动.分析结果验证了液滴是在静电力的作用下实现移动.
In this paper,an electrostatic force based digital microfluidic chip was designed and fabricated.Optimization of the chip structure by employing silicon wafer substrate,TiW/Au electrodes,thin silicon nitride dielectric layer and fluorocarbon polymer hydrophobic layer decreases the driving voltage dramatically.Deionized water droplets were successfully transported in two-dimension on this chip under only 30V with transported velocity of 96mm/s.0.9%of sodium chloride mass fraction solution droplets were also successfully transported on this chip.Further investigation confirmed that electrostatic force is the driving force of the droplets.
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