生物定量检测中,生物样品是否均匀混合的研究意义重要.石英晶体微质量天平(QCM)因其振幅谐振机理,而具备优异的超声混合性能.本文结合微电子机械系统(MEMS)工艺,利用双面曝光、QCM预支撑和120℃长时间烘胶等改进方法,制备了尺寸可控、表面平整、结合紧密的SU-8芯片主体结构,利用聚二甲基硅氧烷(PDMS)封装获得完整的液相混合微芯片,最后利用罗丹明B荧光染料和SiO2纳米球对芯片的混合性能进行了表征.同时,本文提供了一种小体积、便捷、通用性好的液相混合微芯片的制备方法.
Uniform mixing of biological samples is important for quantitative detection.QCM(Quartz Crystal Microbalance)supports excellent ultrasonic ability for its amplitude resonance.An effective microchip based on QCM and SU-8 for solution mixing was reposed in this paper..The SU-8 main chip with controllable size,smooth surface and total binding,which was finally integrated with PDMS elastomer,was fabricated by improved MEMS technology,such as double-side exposure,pre-supporting of QCM and long time hard bake at 120℃.The mixing ability of this chip was characterized by Rhodamine B and SiO2 nano-spheres.This paper will contribute to fabrication of mixing chips which are small size,convenient to be used.effective and easy to be integrated with other functional microchips.
参考文献
| [1] | Kang HW;Muramatsu H .Monitoring of cultured cell activity by the quartz crystal and the micro CCD camera under chemical stressors[J].Biosensors & Bioelectronics: The International Journal for the Professional Involved with Research, Technology and Applications of Biosensers and Related Devices,2009(5):1318-1323. |
| [2] | Renee L. Bunde;Eric J. Jarvi;Jeffrey J. Rosentreter .Piezoelectric quartz crystal biosensors[J].Talanta: The International Journal of Pure and Applied Analytical Chemistry,1998(6):1223-1236. |
| [3] | Zhang B;Mao Q.G;Zhang X et al.A Novel Piezoelectric Quartz Micro-array lmmunosensor Based on Selfassembled Monolayer for Determination of Human Chorionic gonadotro-pin[J].Biosensors and Bioelectronics,2004,19(07):712-720. |
| [4] | Zheng Wang;Lik H.Wee;Boriana Mihailova .Langmuir-Blodgett Deposited Monolayers of Silicalite-1 Seeds for Secondary Growth of Continuous Zeolite Films[J].Chemistry of Materials: A Publication of the American Chemistry Society,2007(24):5806-5808. |
| [5] | Martin B.A;Hager H.E .Velocity Profile on Quartz Crystal Oscillating in Liquids[J].Journal of Applied Physics,1989,65(07):2630-2635. |
| [6] | Ward M.D;Delawski E.J .Radial Mass Sensitivity of the Quartz Crystal Microbalance in Liquid Media[J].Analytical Chemistry,1991,63(09):886-890. |
| [7] | Ferrante F;Kipling A.L .Molecular Slip at the Solidliquid Interface of an Acoustic-wave Sensor[J].Journal of Applied Physics,1994,76(04):3448-3346. |
| [8] | Bogush G.H;Tracy M.A;ZukoskiIV C.F .Preparation of monodisperse silica particles--control of size and mass fraction[J].Journal of Non-Crystalline Solids,1988,104(01):95-106. |
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