采用射频磁控溅射方法在不同形貌的Mo电极上制备了(002)择优取向的AIN薄膜.采用XRD、FESEM表征了Mo电极及AIN薄膜的结构、表面形貌及择优取向.结果表明,Mo电极的形貌影响AIN薄膜的择优取向生长,在较高溅射气压下沉积的Mo电极晶粒细小、分布均匀,有助于AIN薄膜(002)择优取向生长.
Mo electrode and(002)-oriented AIN films were deposited by reactive magnetron sputtering under various sputtering pressures.The films were characterized by X-ray diffraction(XRD),atomic force microscopy(AFM)and field-emission scanning electron microscopy(FESEM).It was found that the orientation of AIN films was influenced by the morphologies of Mo electrodes.The AIN films deposited on Mo electrode performs as fine grains exhibits highly(002)orientation.
参考文献
[1] | Martin F;Jan ME;Belgacem B;Dubois MA;Muralt P .Shear mode coupling and properties dispersion in 8 GHz range AlN thin film bulk acoustic wave (BAW) resonator[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2006(1/2):341-343. |
[2] | C. Cibert;M. Chatras;C. Champeaux;D. Cros;A. Catherinot .Pulsed laser deposition of aluminum nitride thin films for FBAR applications[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2007(19):8151-8154. |
[3] | Hara M;Kuypers J;Abe T;Esashi M .Surface micromachined AlN thin film 2 GHz resonator for CMOS integration[J].Sensors and Actuators, A. Physical,2005(2):211-216. |
[4] | Toshiro K;Morito A .Local epitaxial growth of aluminum nitride and molybdenum thin films in fiber texture using aluminum nitride interlayer[J].Applied Physics Letters,2007,89(07):071919. |
[5] | Toshihiro Kamohara;Morito Akiyama;Naohiro Ueno;Kazuhiro Nonaka;Noriyuki Kuwano .Influence of aluminum nitride interlayers on crystal orientation and piezoelectric property of aluminum nitride thin films prepared on titanium electrodes[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2007(11):4565-4569. |
[6] | J.S. Cherng;D.S. Chang .Effects of outgassing on the reactive sputtering of piezoelectric A1N thin films[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2008(16):5292-5295. |
[7] | Inoue S;Okamoto K;Nakano T;Fujioka H .Characteristics of single crystalline AlN films grown on Ru(0001) substrates[J].Journal of Crystal Growth,2006(2):317-320. |
[8] | Wang B;Wang M .The Growth of AIN films composed of silkworm-shape grains and the orientation mechanism[J].Materials Letters,2002,53(4-5):367-370. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%