采用喷雾热解法,以四氯化锡和氟化铵为原料、喷瓶为雾化装置,在载玻片上制得氟掺杂二氧化锡(fTO)透明导电薄膜.运用XRD、SEM、紫外-可见分光光度计和四探针测试仪分别对薄膜进行了表征.研究了喷涂次数、衬底温度、前体浓度、掺杂浓度和醇水比对FTO薄膜光电性能的影响.结果表明,当衬底温度为500℃,SnCl4·5H2O浓度为0.81 mol/L,NH4F浓度为0.1 mol/L,醇水比为8:2,喷涂100次时,薄膜的光电性能较好,其方块电阻为13Ω/口,平均透光率为79%.
Transparent conducting thin films of F:SnO2 have been deposited onto preheated microscopic glass slides by intermittent spray pyrolysis deposition using pentahydrate stannic chloride(SnCl4·5H2O)and ammonium fluoride(NH4F)as precursors.A perfume atomizer for cosmetics use has been used for deposition.As-deposited films were characterized by XRD,SEM,UV-VIS spectrophotometer and four-point-probe setup.The influence of spray times,substrate temperature,precursor concentration,doping concentration and ethanol to water ratio on the optical and electrical properties of films above mentioned were discussed.The results show that the sheet resistance of the thin films is 13Ω/□ and the average transmittance is 79%,when the concentration of SnCl4·5H2O is 0.81 mol/L,the concentration of NH4F is 0.1 mol/L,the ethanol to water ratio is 8:2,being sprayed 100 times at 500 ℃.
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