针对二氧化钒微测辐射热计在红外吸收型气体检测方面的应用,采用微电子机械系统(MEMS)体硅工艺制备了二氧化钒微测辐射热计,重点对关键工艺进行了研究;通过优化工艺参数及步骤,制得的微测辐射热计结构稳定,成品率高;对单元器件的性能参数进行测试,结果表明,在光源调制频率为1Hz时,单元器件的响应率为18.1kV/W;探测率为1.37×108cmHz1/2/W;热时间常数为72.4ms.
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