以普通玻璃为衬底,采用溶胶-凝胶旋涂法制备出c轴择优取向性、高可见光透过率以及低电阻率的ZnO:Sn(TZO)薄膜.利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、四探针及紫外-可见分光光度计(UV-VIS)等手段,研究了不同Sn掺杂浓度对薄膜的晶体结构、表面形貌、电学和光学特性的影响.实验结果表明,在500℃的空气中热处理,然后在低温环境快速冷却,得到的TZO薄膜均具有六角纤锌矿结构,且呈c轴择优取向,薄膜在可见光范围内平均透光率超过90%,同时当Sn掺杂浓度为3 at.%时,薄膜的电阻率达到最小值8.2×10-1Q·cm.
参考文献
| [1] | Tang ZK.;Yu P.;Kawasaki M.;Ohtomo A.;Koinuma H.;Segawa Y.;Wong GKL. .Room-temperature ultraviolet laser emission from self-assembled ZnO microcrystallite thin films[J].Applied physics letters,1998(25):3270-3272. |
| [2] | Wenas W W;Yamada A;Takahashi K et al.Electrical and optical properties of Al-doped ZnO thin films for solar cells grown by metalorgenic chemical vapor deposition[J].Journal of Applied Physics,1991,70:7119. |
| [3] | Y. Zhou;P.J. Kelly;A. Postill;O. Abu-Zeid;A.A. Alnajjar .The characteristics of aluminium-doped zinc oxide films prepared by pulsed magnetron sputtering from powder targets[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2004(1):33-39. |
| [4] | Kim H.;Horwitz JS.;Murata H.;Kafafi ZH.;Gilmore CM.;Chrisey DB.;Pique A. .Effect of aluminum doping on zinc oxide thin films grown by pulsed laser deposition for organic light-emitting devices[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(0):798-802. |
| [5] | Barnes TM;Leaf J;Fry C;Wolden CA .Room temperature chemical vapor deposition of c-axis ZnO[J].Journal of Crystal Growth,2005(3/4):412-417. |
| [6] | J.H.Lee;B.-O.Park .Characteristics of Al-doped ZnO thin films obtained by ultrasonic spray pyrolysis:effects of Al doping and an annealing treatment[J].Materials Science and Engineering B,2004,106:242-245. |
| [7] | T. Schuler;M. A. Aegerter .Optical, electrical and structural properties of sol gel ZnO:Al coatings[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1999(12):125-131. |
| [8] | Fu E G;Zhuang D M;Gong Zhang et al.Substrate temporature dependence of the properties of ZAO thinfilms deposited by magnetron sputtering[J].A pplied Surf ace Science,2003,217(124):88294. |
| [9] | Chien-Yie Tsay;Hua-Chi Cheng;Yen-Ting Tung;Wei-Hsing Tuan;Chung-Kwei Lin .Effect Of Sn-doped On Microstructural And Optical Properties Of Zno Thinfilms Deposited By Sol-gel Method[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2008(3):1032-1036. |
| [10] | B.D.Cullity.Elements of X-Ray Diffraction[M].Addison-Wesley Publishing Company,Inc,London,1978 |
| [11] | 张德恒 .透明导电薄膜中光吸收边的移动[J].半导体杂志,1998,23(03):34243. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%