SOI(绝缘体上硅)器件在总剂量辐照下的主要性能退化是由于SOI器件的背栅阈值电压漂移引起的背沟道漏电.本文首先采用二维有限元方法,对辐射在SOI器件的埋氧层中的感生氧化物电荷进行模拟,然后分析此氧化物电荷对器件的外部电学特性的影响,建立了器件在最劣偏置下辐射引起的背栅MOSFET的阈值电压漂移模型,提取背栅MOSFET受辐射影响参数,以用于在SOI电路设计中准确的评估辐射对SOI电路的影响.模拟数据和试验数据具有很好的一致性.
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