采用PECVD工艺在普通玻璃衬底上制备非晶硅薄膜,用波长为532nm的倍频Nd:YAG激光对非晶硅薄膜的表层进行了晶化.研究了激光能量密度对非晶硅薄膜表面结晶度以及晶粒大小的影响,并对晶化后的非晶硅表面形貌进行了表征.研究结果表明:该非晶硅薄膜晶化的阈值能量密度为800 mJ/cm2,当激光能量密度大于该值时,晶化效果反而变差.同时经过拉曼光谱表征,经由高斯拟合和数值计算得出薄膜结晶度在45%～60%之间,平均晶粒尺寸在30～50nm.
参考文献
| [1] | S D Brotherton .Polycrystalline silicon thin film transistors[J].Semicond Sci,1995,10:721-738. |
| [2] | S Ecoffey;D Bouvet;AM Ionescu et al.Low-pressure chemical vapor deposition of nanograin polysilicon ultra-thin films[J].Nanotechnology,2002,13:290-293. |
| [3] | D DasHydrogen .plasma induced micro crystalline layer by layer growth scheme[J].Solar Energy Materials and Solar Cells,2004,81:169-181. |
| [4] | Makoto Tanaka;Shingo Okamo.[A].,2003:125-143. |
| [5] | 袁志军,楼祺洪,周军,董景星,魏运荣,王之江.平顶绿光晶化制备多晶硅薄膜[J].中国激光,2009(01):205-209. |
| [6] | 徐刚毅,王天民,李国华,王金良,何宇亮,马智训,郑国.纳米硅薄膜的Raman光谱[J].半导体学报,2000(12):1170-1176. |
| [7] | Hecheng Zou;Liangcai Wu;Xinfan Huang;Feng Qiao;Peigao Han;Xiaohui Zhou;Zhongyuan Ma;Yansong Liu;Wei Li;Kunji Chen .Microstructure properties of nanocrystalline silicon/SiO_2 multilayers fabricated by laser-induced crystallization[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2005(1/2):212-216. |
| [8] | 丁硕,刘玉龙,萧季驹.不同晶粒尺寸SnO2纳米粒子的拉曼光谱研究[J].物理学报,2005(09):4416-4421. |
| [9] | T. Csako;O. Berkesi;I. Kovacs .Si-doped carbon nanostructured films by pulsed laser deposition from a liquid target[J].Solid state sciences,2009(10):1783-1787. |
| [10] | Yusaku Izawa;Shigeki Tokita et al.Uhrathin amorphization of single-crystal silicon by ultraviolet femtosecond laser pulse irradiation[J].Journal of Applied Physics,2009,105 |
| [11] | B.V Kamenev;H.Grebel;L.Tsybeskov .[J].Applied Physics Letters,2006,88:143117. |
| [12] | Edelman F.;Chack A.;Weil R.;Beserman R.;Khait YL.;Werner P.;Rech B. Roschek T.;Carius R.;Wagner H.;Beyer W. .Structure of PECVD Si : H films for solar cell applications[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2003(2):125-143. |
| [13] | Li SB;Wu ZM;Liao W;Jiang YD .Investigation of the microstructure and optical properties of hydrogenated polymorphous silicon films prepared with pure silane[J].Philosophical magazine: structure and properties of condensed matter,2007(34/36):5539-5549. |
| [14] | Fontcuberta I;Mortal A;Roca i Cabarrocas P .[J].Thin Solid Films,2009,383:161. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%