本文采用传统的光刻工艺、丝网印刷技术和烧结工艺在ITO透明导电薄膜上制备出电容式的碳纳米管(CNT)膜气敏传感器,探讨扫描电压、工作频率和各种工艺参数对其性能的影响.光学显微镜测试表明,丝网印刷的CNT膜表面平整、分布均匀.扫描电镜表征显示,在大气中300℃烧结能促使有机粘合剂充分地分解和蒸发,在CNT膜中留下能有效提高气体吸附面积的丰富间隙.半导体特性分析仪分析表明,CNT膜气敏传感器经300℃烧结后在室温条件下,电容和电导对乙醇的灵敏度分别为198%和197%.
参考文献
| [1] | Qin Liu;Xuying Hu;Jianwei Xie .Determination of nerve agent degradation products in environmental samples by liquid chromatography-time-of-flight mass spectrometry with electrospray ionization[J].Analytica chimica acta,2004(1):93-101. |
| [2] | Baselt DR.;Fruhberger B.;Klaassen E.;Cemalovic S.;Britton CL.;Patel SV.;Mlsna TE.;McCorkle D.;Warmack B. .Design and performance of a microcantilever-based hydrogen sensor[J].Sensors and Actuators, B. Chemical,2003(2):120-131. |
| [3] | Wu, RJ;Chang, WC;Tsai, KM;Wu, JG .The Novel CO sensing material CoOOH-WO3 with Au and SWCNT performance enhancement[J].Sensors and Actuators, B. Chemical,2009(1):35-41. |
| [4] | Junya Suehiro;Guangbin Zhou;Hiroshi Imakiire;Weidong Ding;Masanori Hara .Controlled fabrication of carbon nanotube NO_2 gas sensor using dielectrophoretic impedance measurement[J].Sensors and Actuators, B. Chemical,2005(1/2):398-403. |
| [5] | S. Radhakrishnan;Santhosh Paul .Conducting polypyrrole modified with ferrocene for applications in carbon monoxide sensors[J].Sensors and Actuators, B. Chemical,2007(1):60-65. |
| [6] | Waghuley SA;Yenorkar SM;Yawale SS;Yawale SP .Application of chemically synthesized conducting polymer-polypyrrole as a carbon dioxide gas sensor[J].Sensors and Actuators, B. Chemical,2008(2):366-373. |
| [7] | Hee-Kwon Jun;Yong-Su Hoh;Byung-Soo Lee;Sang-Tae Lee;Jeong-Ok Lim;Duk-Dong Lee;Jeung-Soo Huh .Electrical properties of polypyrrole gas sensors fabricated under various pretreatment conditions[J].Sensors and Actuators, B. Chemical,2003(3):576-581. |
| [8] | Collins PG;Bradley K;Ishigami M;Zettl A .Extreme oxygen sensitivity of electronic properties of carbon nanotubes[J].Science,2000,287(5459):1801-1804. |
| [9] | Q. Wan;Q. H. Li;Y. J. Chen;T. H. Wang;X. L. He;J. P. Li;C. L. Lin .Fabrication and ethanol sensing characteristics of ZnO nanowire gas sensors[J].Applied physics letters,2004(18):3654-3656. |
| [10] | Lee, SC;Choi, HY;Lee, SJ;Lee, WS;Huh, JS;Lee, DD;Kim, JC .The development of SnO2-based recoverable gas sensors for the detection of DMMP[J].Sensors and Actuators. B, Chemical,2009(1):239-245. |
| [11] | 文常保,朱长纯,巨永锋,邱彦章,许宏科,胡小东,吴媛,刘君华.基于WO3薄膜的双声路声表面波型SO2气体传感器[J].功能材料与器件学报,2009(01):1-6. |
| [12] | Valentini L;Lozzi L;Picozzi S et al.AVS-Nanotubes-Adsorption of oxidizing gases on multlwalled carbon nanotubes[J].Journal of Vacuum Science and Technology A:Vacuum Surfaces and Films,2004,22(04):1450-1454. |
| [13] | 王昌龙,竺志大.多层膜气体传感器研制与特性试验[J].仪器仪表学报,2009(07):1395-1399. |
| [14] | E.Ayyildiz;C.Nuho Lu;A Turut .The determination of the interface-state density distribution from the capacitance-frequency measurements in Au/n-Si schottky barrier diodes[J].Journal of Electronic Materials,2002(2):119-123. |
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