在不锈钢柔性衬底上采用等离子体化学气相沉积(PECVD)方法制备了不同结构的n型硅薄膜,测试了在其上生长的微晶硅太阳电池的电学输出特性.发现太阳电池的开路电压随n型层的硅烷浓度线形变化,短路电流密度则存在一个最优值,这与n型层引起的本征层中的孵化层和结构演变有关.将优化后的n型层应用于不锈钢柔性衬底的非晶硅/微晶硅叠层太阳电池,获得了9.28%(AM0,1353W/m2)和11.26%(AM1.5,1000W/m2)的光电转换效率.
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