在低成本的石英玻璃衬底上制备高性能电光薄膜非常有吸引力.本文采用溅射方法,并结合Pb3O4气氛退火工艺,在ITO/石英玻璃衬底上制备锆钛酸铅镧(PLZT 8/65/35)薄膜.结果表明:在优化工艺条件下,薄膜为(110)方向择优生长,表面均方根粗糙度为3.1nm,可见光范围内透过率为81.3%,消光系数为0.003.这种表面光滑和高光学性能的PLZT薄膜在集成光学和光电子器件具有重要的应用潜力.
参考文献
| [1] | C. J. Lu;S. B. Ren;H. M. Shen .Microstructure, composition, and optical properties of PbTiO↓(3) thin films prepared by the sol-gel method[J].Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films,1997(4):2167-2172. |
| [2] | M. P. Moret;M. A. C. Devillers;K. Worhoff;P. K. Larsen .Optical properties of PbTiO_(3), PbZr_(x)Ti_(1-x)O_(3), and PbZrO_(3) films deposited by metalorganic chemical vapor on SrTiO_(3)[J].Journal of Applied Physics,2002(1):468-474. |
| [3] | Crystallographic and optical properties of epitaxial Pb(Zr_(0.6),Ti_(0.4))O_(3) thin films grown on LaAlO_(3) substrates[J].Journal of Applied Physics,2003(8):5167-5171. |
| [4] | Yalin Lu;G.-H. Jin;M. Cronin-Golomb .Fabrication and optical characterization of Pb(Mg↓(1/3)Nb↓(2/3))O↓(3)-PbTiO↓(3) planar thin film optical waveguides[J].Applied physics letters,1998(19/23):2927-2929. |
| [5] | Spectroscopic ellipsometry study of epitaxially grown Pb(Mg_(1/3)Nb_(2/3)) O_(3)-PbTiO_(3)/MgO/TiN/Si heterostructures[J].Applied physics letters,2003(8):1599-1601. |
| [6] | K.Y.Chan;W.S.Tsang;C.L.Mak;K.H.Wong .Effects of composition of PbTiO3 on optical properties of (1-x)PbMg1/3Nb2/3O3xPbTiO3 thin films[J].Physical Review B,2004,69:144111-1441-5. |
| [7] | Zhang WF.;Zhang MS.;Huang YB. .Optical properties of ferroelectric (Pb, La) (Zr, Ti) O-3 thin films grown by pulsed laser deposition[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2000(3/4):185-189. |
| [8] | A.B.Wegner;S.J.R.Brueck;A.Y.Wu .Integrated PLZT Thin Film Waveguide Modulators[J].Ferroelectrics,1991,116:195-204. |
| [9] | R.Thapliya;Y.Okano;and S.Nakamura .Electrooptic Characteristics of Thin-Film PLZT Waveguide Using Ridge-Type Mach-Zehnder Modulator[J].Journal of Lightwave Technology,2003,21:1820-1827. |
| [10] | X.Dai;Z.Xu;J.F.Li;D.Viehland .Effects of lanthanum modification on rhombohedral Pb (Zr1 -χ Tiχ) O3 ceramics.2.Relaxor behavior versus enhanced antiferroelectric stability[J].Journal of Materials Research,1996,11:618-625. |
| [11] | B.W.Wessels;M.J.Nystrom;J.Chen;D.Studebaker,T.J.Marks .Epitaxial niobate thin films and their nonlinear optical properties[J].Materials Research Society Symposium Proceedings,1996,401:211-218. |
| [12] | Hu ZG.;Shi FW.;Lin T.;Huang ZM.;Wang GS.;Wu YN.;Chu JH. .Infrared spectroscopic ellipsometry of (Pb, La)(Zr, Ti)O-3 thin films on platinized silicon[J].Physics Letters, A,2004(5/6):478-486. |
| [13] | X.G. Tang;A.L. Ding;Y. Ye;W.X. Chen .Preparation and characterization of highly (111)-oriented (Pb,La)(Zr,Ti)O_3 thin films by sol-gel processing[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2003(1):13-17. |
| [14] | A. Amassian;M. Gaidi;M. Chaker;L. Martinu .Optical depth profiling of strontium titanate and electro-optic lanthanum-modified lead zirconium titanate multilayer structures for active waveguide applications[J].Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films,2006(1):55-64. |
| [15] | Zhang WF.;Zhang MS.;Huang YB. .Optical properties of ferroelectric (Pb, La) (Zr, Ti) O-3 thin films grown by pulsed laser deposition[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2000(3/4):185-189. |
| [16] | Y.W.Li;J.L.Sun;X.J.Meng;J.H.Chu,and W.F.Zhang .Structural and optical properties of Ba (Cox,Ti1 -χ)O3 thin films fabricated by sol -gel process[J].Applied Physics Letters,2004,85:1964-1966. |
| [17] | W.J.Leng;C.R.Yang;J.H.Zhang;H.W.Chen,H.Ji,C.L.Fu,and J.X.Liao .Structural and optical properties of BaχSr1 -χTiO3 thin films on indium tin oxide/quartz substrates prepared by radio-frequency magnetron sputtering[J].Journal of Applied Physics,2006,99:114904-1141-5. |
| [18] | W.J.Leng;C.R.Yang;H.Ji;J.H.Zhang,H.W.Chen,and J.L.Tang .Structure-related optical properties of (Pb,La) (Zr,Ti) O3 thin fils on indium tin oxide/quartz substrates[J].Journal of Applied Physics,2006,100:083505-0831-6. |
| [19] | S.Krishnakumar;V H Ozguz;C Fan;C Cozzolino,S C Esener and S H Lee .Deposition and characterization of thin ferroelectric lead lanthanum zirconate titanate (PLZT) films on sapphire for spatial light modulator applications[J].IEEE Trans on Ferro and Freq Control,1991,38(06):585-590. |
| [20] | V. Fuflyigin;A. Osinsky;F. Wang .Growth of ferroelectric oxide films on n-GaN/c-sapphire structures[J].Applied physics letters,2000(12):1612-1614. |
| [21] | 蒋力立,唐新桂,周歧发.PLZT薄膜的结构、介电与光学性能的研究[J].压电与声光,2003(05):403-406. |
| [22] | M. Gaidi;A. Amassian;M. Chaker;M. Kulishov;L. Martinu .Pulsed laser deposition of PLZT films: structural and optical characterization[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2004(4):347-354. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%