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碳纳米管因其独特而优异的电学、力学、热学、化学及电子特性等在很多领域上展现应用的潜力,而近年来碳纳米管在压力传感器方面的应用成为研究热点之一.本文综述了碳纳米管压力传感器的基本原理以及研究进展,并对不同类型的碳纳米管压力传感器进行了比较.

参考文献

[1] Iijima S .Helical microtubules of graphitic carbon[J].Nature,1991,354(07):56-58.
[2] Tombler T W;Zhou C W;Alexseyev L et al.Reverible electromechonical characteristics of carbon nanotubes under probe manipulation[J].Nature,2000,405:769.
[3] Stampfer C;Helbling T;Obergfell D;Schoberle B;Tripp MK;Jungen A;Roth S;Bright VM;Hierold C .Fabrication of single-walled carbon-nanotube-based pressure sensors[J].Nano letters,2006(2):233-237.
[4] Stampfer C;Jungen A;Linderman R;Obergfell D;Roth S;Hierold C .Nano-electromechanical displacement sensing based on single-walled carbon nanotubes[J].Nano letters,2006(7):1449-1453.
[5] Helbling T;Drittenbass S;Durrer L;Roman C and Hierold C.Ultra Small Single Walled Carbon Nanotube Pressure Sensors[J].Proceedings of the IEEE Micro Electro Mechanical Systems(MEMS),2009:575-578.
[6] Carmen K M F;Maggie Q H Z;Dong Z;Wen J L .Fabrication of CNT-based MEMS piezoresistive pressure sensors using DEP nanoassembly[J].Proceedings of 20055th IEEE Conference on Nanotechnology,2005,1:199-202.
[7] Kangwon Lee;Seung S. Lee;Jung A Lee;Kwang-Cheol Lee;Seungmuk Ji .Carbon nanotube film piezoresistors embedded in polymer membranes[J].Applied physics letters,2010(1):013511-1-013511-3.
[8] Rinzler AG;Hafner JH;Nikolaev P;Lou L;Kim SG;Tomanek D .UNRAVELING NANOTUBES - FIELD EMISSION FROM AN ATOMIC WIRE[J].Science,1995(5230):1550-1553.
[9] Deheer WA;Chatelain A;Ugarte D .A CARBON NANOTUBE FIELD-EMISSION ELECTRON SOURCE[J].Science,1995(5239):1179-1180.
[10] Walt A. de Heer;Jean-Marc Bonard;Kai Fauth;Andre Chatelain;Laszlo Forro;Daniel Ugarte .Electron Field Emitters Based on Carbon Nanotube Films[J].Advanced Materials,1997(1):87-89.
[11] Enhanced electron emission from carbon nanotubes through density control using in situ plasma treatment of catalyst metal[J].Journal of Applied Physics,2003(1):487-490.
[12] Effect of length and spacing of vertically aligned carbon nanotubes on field emission properties[J].Applied physics letters,2003(20):3520-3522.
[13] Pekarek J;Ficek R;Vrba R;Magat M.Electrodes modified by carbon nanotubes for pressure measuring[J].Electronics Technology,2009:1-5.
[14] Qian K.;Chen T.;Yan B.;Lin Y.;Xu D.;Sun Z.;Cai B. .Research on carbon nanotube array field emission pressure sensors[J].Electronics Letters,2005(14):824-825.
[15] In-Mook Choi;Sam-Yong Woo;Seung-Soo Hong .Vacuum measurement by carbon nanotube field emission[J].Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films,2006(4):1556-1559.
[16] Jungen A;Gauckler J;Stampfer C;Durrer L Helbling T and Hierold C.Temperature-dependent properties of an individual MEMS integrated single-walled carbon nanotube[J].Proceedings of the IEEE Micro Electro Mechanical Systems(MEMS),2008:733-736.
[17] Kanl A B;Manohara H M .Carbon Nanotube Vacuum Gauges With Wide Dynamic Range[J].Nanotechnology,2009,8(02):252-257.
[18] Kawano T;Suter M;Cho C Y;Chiamori H and Lin L .Single Carbon Nanotube Pirani Gauge By Local Synthesis[J].Transducers & Eurosensor,2007,1:1015-1018.
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