采用化学水浴法,在醋酸镉、硫脲、氨水、醋酸铵的体系中制备CdS薄膜,设计L2556正交实验,研究了各沉积参数对前驱物利用率的影响.结果表明,随前驱物醋酸镉、硫脲各自浓度的增加,其自身的利用率下降,但另一方的利用率上升.前驱物的利用率随络合剂醋酸铵浓度的增加先增大后减小,随氨水浓度的增加先减小后增大；其利用率随反应条件温度的增大先增大后保持稳定,随转速的加快先保持稳定后降低,最后又小幅度上升.正交实验表明,当醋酸镉、硫脲、醋酸铵、氨水的浓度分别为2、14、30、400mM/L,温度为70℃,转速为200r/min时,前驱物醋酸镉与硫脲的综合利用率最高.
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