建立了包括质量效应、键合效应和轰击诱发吉布斯偏析效应的蒙特卡罗模拟程序; 并对轰击诱发吉布斯偏析效应的两大特征(表面成分梯度特征和表面成分梯度的中间性特征)进行了研究. 模拟解析了为何在被轰击合金表面形成了一个偏析元素的成分梯度; 为何被轰击合金表面的成分梯度、溅射角分布和溅射产额具有中间性特征.
参考文献
| [1] | Zheng L P,Qiu S,Li S Y. Molecular Dynamics Simulation of the Isotopic Mass Effect in Zero-fluence and Low-bombarding-energy Sputtering [J]. Appl Surf Sci,1999,143: 215. |
| [2] | Zheng L P. The Role of Cascade Atoms in the Zero-fluence and the Low-bombarding-energy Isotope Sputtering [J]. Nucl Instr and Meth,2000,B160: 29. |
| [3] | Sigmund P. Mechanisms and Theory of Physical Sputtering by Particle Impact [J]. Nucl Instr and Meth,1987,B27: 1. |
| [4] | Kelly R,Oliva A. New Estimates of the Characteristic Depth of Sputtering and of the Bombardment-induced Segregation Ratio [J]. Nucl Instr and Meth,1986,B13: 283. |
| [5] | Kelly R. Bombardment-induced Gibbsian Segregation and Its Role in Secondary Ion Formation [J]. Nucl Instr and Meth,1986,B14: 421. |
| [6] | Kelly R. Bombardment-induced Compositional Change with Alloys,Oxides,Oxysalts and Halides [J]. Nucl Instr and Meth,1989,B39: 45. |
| [7] | Li R S,Koshikawa T,Goto K. Changes in Gold Concentration at the Surface of a Au-Cu Alloy Sputtered at Low Temperature [J]. Surf Sci,1982,121: L561. |
| [8] | Andersen H H,Stenum B,Sorensen T,et al. Surface Segregation during Alloy Sputtering and Implantation [J]. Nucl Instr and Meth,1983,209/210: 487. |
| [9] | Li R S,Koshikawa T. Ion Radiation-enhanced Diffusion and Segregation in an Au0.56Cu0.44 Alloy between -120° and Room [J]. Surf Sci,1985,151: 459. |
| [10] | Li R S,Li C F,Zhang W L. Bombardment-induced Segregation of Cu in Pt-Cu Alloy Observed Using Different Energy Auger Line Combinations [J]. Appl Phys,1990,A50: 169. |
| [11] | Li R S,Li J H,Hu T Z. Surface Composition Changes Caused by Ar Ion Bombardment of Au-Ni Alloys [J]. Surf Sci,1992,260: 209. |
| [12] | Li R S,Li J H,Hu T Z. Quantitative Auger Electron Spectroscopy Analysis of the Au-Ni System [J]. Appl Surf Sci,1993,68: 123. |
| [13] | Li R S. Influence of Bombardment-induced Gibbsian Segregation on Alloy Sputtering [J]. Nucl Instr and Meth,1993,B82: 283. |
| [14] | Zheng L P,Cui F Z. A Monte Carlo Simulation of Angular Distribution in Low Energy Sputtering [J]. Vacuum,1989,39: 353. |
| [15] | Zheng L P,Li R S,Li M Y,et al. Segregation Effect on Surface Composition in Alloy Sputtering [J]. Chinese Phys Lett,1990,7: 140. |
| [16] | Zheng L P,Li R S,Li M Y,et al. Sputtering Angular Distributions of Individual Elements for Low-energy Ar Ion Irradiation of Pt-Cu Alloy [J]. Chinese Phys Lett,1991,8: 44. |
| [17] | Zheng L P,Li R S,Li M Y,et al. Enrichment Transformation between Individual Elements in the Near-normal Direction during Binary Alloy Sputtering [J]. Nucl Instr and Meth,1992,B71: 39. |
| [18] | Zheng L P,Xia X Q,Li M Y,et al. Studies of Correlations between Surface Composition Changes and Ion Bombardment Fluences of Multicomponent Materials [J]. J Mater Sci Technol,1993,9: 229. |
| [19] | Zheng L P,Li R S,Li M Q,et al. Correlations between Mean Sputter Depth and Ion Fluence during Sputtering of Binary Component Materials [J]. Vacuum,1995,46: 49. |
| [20] | Zheng L P,Li R S,Li M Y,et al. Matrix Effect of Bombardment-induced Gibbsian Segregation on Cu Depletion at a CuXNi100-X Subsurface [J]. Appl Phys,1995,A61: 419. |
| [21] | Zheng L P,Li R S. Dependence of Surface-compositional and Angular Distributions on the Bulk Composition in the Sputtering of Cu-Pt and Cu-Ni Alloys [J]. Nucl Instr and Meth,1997,B129: 16. |
| [22] | Zheng L P,Li R S,Li S Y. On the Relation between Preferential Emission and Bulk Composition in Binary Alloy Sputtering [J]. J Vac Sci Technol,1997,A15: 2 431. |
| [23] | Zheng L P,Li R S,Li M Y. Calculation of Sputtering Yields under High-fluence Bombardment of a CuXNi1-X Alloy [J]. Vacuum,1998,51: 413. |
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