欢迎登录材料期刊网

材料期刊网

高级检索

利用飞秒激光对透明材料进行改性和加工,制备三维微结构和器件受到极大的关注.本文介绍了在透明材料内部或表面进行微制备的方法和应用,包括利用飞秒激光诱导的折射率变化来制作光波导、光栅和耦合器等;利用材料内部的微爆炸实现三维点存储和其它三维点阵结构等;通过界面的烧蚀过程进行打孔、切割和刻蚀等;利用双光子聚合制备微透镜、光子晶体和衍射光学元件等等.

参考文献

[1] Davis K M,Miura K,Sugimoto N,et al.waveguides in glass with a femtosecond laser [J].Opt.Lett.,1996,21:1729-1731.
[2] Miura K,Qiu J R,Inouye H,et al.Photowritten optical waveguides in various glasses with ultrashort pulse laser [J].Appl.Phys.Lett.,1997,71:3329-3331.
[3] Homoelle D,Wielandy S,Gaeta A L,et al.Infrared photosensitivity in silica glasses exposed to femtosecond laser pulses [J].Opt.Lett.,1999,24:1311-1313.
[4] Yamada K,Watanabe W,Toma T,et al.In situ observation of photoinduced refractive-index changes in filaments formed in glasses by femtosecond laser pulses [J].Opt.Lett.,2001,26:19-21.
[5] Schaffer C B,Brodeur A,Garcia J F,et al.Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy [J].Opt.Lett.,2001,26:93-95.
[6] Streltsov A M,Borrelli N F.Fabrication and analysis of a directional coupler written in glass by nanojoule femtosecond laser pulses [J].Opt.Lett.,2001,26:42-43.
[7] Minoshima K,Kowalevicz A M,Ippen E P,et al.Fabrication of coupled mode photonic devices in glass by nonlinear femtosecond laser materials processing [J].Optics Express,2002,10:645-652.
[8] Li Y,Watanabe W,Yamada K,et al.Holographic fabrication of multiple layers of grating inside soda-lime glass with femtosecond laser pulses [J].Appl.Phys.Lett.,2002,80:1508-1510
[9] Glezer E N,Milosavljevic M,Huang L,et al.Mazur E.Three-dimensional optical storage inside transparent materials [J].Opt.Lett.,1996,21:2023-2025.
[10] Glezer E N,Mazur E.Ultrafast-laser driven micro-explosions in transparent materials [J].Appl.Phys.Lett.,1997,71:882-884.
[11] Sun H B,Xu Y,et al.Arbitrary-lattice photonic crystals created by multiphoton microfabrication [J].Opt.Lett.,2001,26:325-327.
[12] Wang D L,Li C D,et al.Sub-diffraction-limit voids in bulk quartz induced by femtosecond laser pulses [J].Chinese Phys.Lett.,2001,18:65-67.
[13] Li C D,Wang D L,Luo L,et al.Feasibility of femtosecond laser writing multi-layered bit planes in fused silica for three-dimensional optical data storage [J].Chinese Phys.Lett.,2001,18:541-543.
[14] Wu Z X,Jiang H B,Zhang Z H,et al.Morphological investigation at the front and rear surfaces of fused silica processed with femtosecond laser pulses in air [J].Optics Express,2002,10:1244-1249.
[15] Kondo Y,Qiu J R,Mitsuyu T,et al.Three-dimensional microdrilling of glass by multiphoton process and chemical etching [J].Japanese J.Appl.Phys.,Part 2,1999,38:L1146-L1148.
[16] Cheng Y,Sugioka K,Midorikawa K,et al.Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser [J].Opt.Lett.,2003,28:55-57.
[17] Marcinkevicius A,Juodkazis S,WatanabeM,et al.Femtosecond laser-assisted three-dimensional microfabrication in silica [J].Opt.Lett.,2001,26:277-279.
[18] Li Y,Itoh K,Watanabe W,et al.Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses [J].Opt.Lett.,2002,26:1912-1914.
[19] Kawamura K,Sarukura N,Hirano M,et al.Holographic encoding of permanent gratings embedded in diamond by two beam interference of a single femtosecond near-infrared laser pulse [J].Jpn.J.Appl.Phys.,Part 2,2000,39:L467-L769
[20] Li Y,Watanabe W,Itoh K,et al.Holographic data storage on nonphotosensitive glass with a single femtosecond laser pulse [J].Appl.Phys.Lett.,2002,81:1952-1954.
[21] Li Y,Yamada K,Ishizuka T,et al.Single femtosecond pulse holography using polymethyl methacrylate [J].Optics Express,2002,10:1173-1178
[22] Maruo S,Nakamura O,Kawata S.Three-dimensional microfabrication with two-photo-absorbed photopolymerization [J].Opt.Lett.,1997,22:132-134.
[23] Kawata S,Sun H B,Tanaka T,et al.Finer features for functional microdevices - Micromachines can be created with higher resolution using two-photon absorption [J].Nature,2001,412:697-698.
[24] Miwa M,Juodkazis S,Kawakami T,et al.Femtosecond two-photon stereo-lithography [J].Appl.Phys.A,2001,73:561-566.
[25] Cumpston B H,Ananthavel S P,Barlow S,et al.Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication [J].Nature,1999,398:51-54.
[26] Shoji S,Sun H B,Kawata S.Photofabrication of wood-pile three-dimensional photonic crystals using four-beam laser interference [J].Appl.Phys.Lett.,2003,83:608-610.
[27] Li C D,Luo L,Wang S F,Huang W T,Two-photon microstructure-polymerization initiated by a coumarin derivative/iodonium salt system [J].Chem.Phys.Lett.,2001,340:444-448.
[28] Luo L,Li C D,Wang S F,et al.Optical microstructures fabricated by femtosecond laser two-photon polymerization [J].J.Opt.A.,2001,3:489-492.
[29] Luo L,Wang D L,Li C D,et al.Formation of diversiform microstructures in wide-bandgap materials by tightfocusing femtosecond laser pulses [J].J.Opt.A,2002,4:105-110.
[30] Guo H C,Guo H C,Jiang H B,et al.Micrograting polymerization fabrication with a single femtosecond laser pulse at 400 nm wavelength [J].Chinese Phys.Lett.,2003,20:682-684.
[31] Guo H C,Jiang H B,Luo L,ct al.Two-photon polymerization of gratings by interference of a femtosecond laser pulse [J].Chem.Phys.Lett.,2003,374:381-384.
上一张 下一张
上一张 下一张
计量
  • 下载量()
  • 访问量()
文章评分
  • 您的评分:
  • 1
    0%
  • 2
    0%
  • 3
    0%
  • 4
    0%
  • 5
    0%