本文介绍了飞秒激光的特性以及超短脉冲激光与材料相互作用的机理,并着重指出了其与长脉冲激光的区别.飞秒激光可产生超高光强、具有精确的损伤阈值(并且损伤阈值较低较低)、很小的热影响区、几乎可精密加工所有种类材料,并且,加工精度极高,可进行亚微米尺寸的精密加工.通过分析飞秒激光材料微加工的特性,综述超短脉冲激光材料微加工的应用研究现状.
参考文献
| [1] | Lu Jian,Ni Xiaowu,He Anzhi.The Physics of Laser Interactions With Materials (激光与材料相互作用物理学) [M].Beijing:China Machine Press,1996.12 (in Chinese). |
| [2] | Wang Jiajin.Laser Processing Principle and Application (激光加工技术) [M].Beijing:China Metrology Press,1992.11 (in Chinese). |
| [3] | Wang Qingyue,Dai Jianming,et al.Femtosecond pulse generation of self-mode- locked Ti:sapphire laser by self-focusing [J].Acta Optica Sinica (光学学报),1993,13:93 (in Chinese). |
| [4] | Wang Qingyue,Dai Jianming,et al.15 fs-pulse generation from a self-mode-locked Ti:sapphire laser with low pump power [J].Chinese Journal Lasers,(中国激光),1997,A24(12):1057 (in Chinese). |
| [5] | Wang Ching-yue,Wang Yong,Chai Lu,et al.Dynamic process of self-started self-mode-locked Ti:sapphire laser with a semiconductor saturable absorber mirror [J].Opt.Laser Technol.2001,81:33. |
| [6] | Wang Chingyue,Chai Lu,Zhang Weili,et al.Pulse colliding in a self-mode-locked ring-cavity Ti:sapphire laser [J].Appl.Opt.,1998,37(3):522-525. |
| [7] | Shirk M D,Molian P A.A review of ultrashort pulsed laser ablation of materials [J].J.Laser Appl.,1998,10:18-28. |
| [8] | Tonshoff H K,et al.Microdrilling of metals with ultrashort laser pulses [J].J.Laser Appl.,2000,12:23-27. |
| [9] | Pronko P P,Dutta S K,Du D,et al.Thermophysical effects in laser processing of materials with picosecond and femtosecond pulses [J].J.Appl.Phys.,1995,78:6233-6240 |
| [10] | Perry M D,et al.Ultrashort-pulse laser machining of dielectric materials [J].J.Appl.Phy.,1999,85:6803- 6810. |
| [11] | Liu Zhi,Li Ruxin,et al.Heating of planar metal targets by ultrashort laser pulses [J].Acta Optica Sinica (光学学报),2000,20(10):1297 (in Chinese). |
| [12] | Nolte S,Chichkov B N,Welling H,et al.Nanostructuring with spatially localized femtosecond laser pulses [J].Opt.Lett.,1999,24(13):914-916. |
| [13] | Chichkov B N,Momma C,Nolte S,et al.Femtosecond,picosecond and nanosecond laser ablation of solids [J].Appl.Phys.A,1996,63(2):109-115. |
| [14] | Momma C,Chichkov B N,Nolte S,et al.Short-pulse laser ablation of solid targets [J].Opt.Commun.,1996,129:134-142. |
| [15] | Momma C,Nolte S,Chichkov B N,et al.Precise laser ablation with ultrashort pulses [J].Appl.Surface Sci.,1997,109/110:15-19. |
| [16] | Ostendorf A.Precision structuring using femtosecond lasers [J].Laser Review,2002,30:221-225. |
| [17] | Venkatakrishnan K,Ngoi B K A,Stanley P,et al.Laser writing techniques for photomask fabrication using a femtosecond laser [J].Appl.Phys.A,2002,74:493-496. |
| [18] | Venkatakrishnan K,Stanley P,Lim L E N.Femtosecond laser ablation of thin films for the fabrication of binary photomasks [J].J.Micromech.Microeng,2002,12:775-779. |
| [19] | Li Yan,Itoh Kazuyoshi,Watanabe Wataru,et al.Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses [J].Opt,Lett.,2001,26(23):1912-1914. |
| [20] | Shah L,Tawney J,Richardson M,et al.Femtosecond laser deep hole drilling of silicate glasses in air [J].Appl.Surf.Sci.,2001,183(3-4):151-164. |
| [21] | Zoubir A,Shah L,Richardson K,et al.Practical uses of femtosecond laser micro-materials processing [J].Appl.Phys.A,2003,77(2):311-315. |
| [22] | Miura K,Qiu Jianrong,Inouye H,et al.Photowritten optical waveguides in various glasses with ultrashort pulse laser [J].Appl.Phys.Lett.,1997,71 (23):3329-3331. |
| [23] | Schneider Th,Wolramm D,Reif J.Ultrafast laser-induced index grating in transparent insulators [J].Nuclear Instruments and Methods in Physics Research B 2000,166-167:809-814. |
| [24] | Scully P J,Jones D,Jaroszynski D A.Femtosecond laser irradiation of polymethylmethacrylate for refractive index gratings [J].J.Opt.A,2003,5:S92-S96. |
| [25] | Nolte S,Will M,Burghoff J,Tuennermann A.Femtosecond waveguide writing:a new avenue to three-dimensional integrated optics [J].Appl.Phys.A,2003,77:109-111. |
| [26] | Chan J W,Huserl T R,Risbud S H,et al.Modification of the fused silica glass network associated with waveguide fabrication [J].Appl.Phys.A,2003,76:367-372. |
| [27] | Tan B,Venkatkrishnan K,Sivakumar N R,et al.Laser drilling of thick material using femtosecond pulse with a focus of dual-frequency beam [J].Opt.Laser Technolo.,2003,35:199-202. |
| [28] | Bruce Craig.Ultrafast pulses promise better processing of fine structures [J].Laser Focus World,1998,34(9):79-86. |
| [29] | Stuart B C,Perry M D,Feit M D,et al.Femtosecond laser materials processing [C]∥ Lasers and Electro-Optics,1997,CLEO '97,11:159-160. |
| [30] | Juhasz T,Loesel F H,Kurtz R M,et al.Corneal refractive surgery with femtosecond lasers [J].IEEE Journal Selected Topics in Quantum Electronics,1999,5(4):902-910. |
| [31] | Banks P S,Stuart B C,Perry M D,et al.Femtosecond laser machining [J].Lasers and Electro-Optics,1998,CLEO'98:510. |
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