集成波导型表面等离子体共振传感芯片是表面等离子体共振传感技术和微电子制造技术相结合的产物.介绍了集成表面等离子体共振传感芯片的工作机理和基本结构,并通过基于传统波导模式的分析法结合表面等离子体波的色散方程,发展出简单实用的波导表面等离子体共振分析方法.利用该方法对波导型表面等离子体共振传感芯片的工作状态进行了理论建模,给出了各特性参数之间的关系.这证明该方法是分析等离子体共振传感芯片优化的有力工具.
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