四配位非晶碳薄膜是近年来发展的一种新型宽带隙半导体材料,具有独特的物理和化学特性.本文对四配位非晶碳薄膜的研究意义,制备方法,形成机理,结构和性能表征及应用前景作较全面的介绍.
参考文献
| [1] | A. Hart;B. S. Satyanarayana;W. I. Milne .Field emission from tetrahedral amorphous carbon as a function of surface treatment and substrate material[J].Applied physics letters,1999(11):1594-1596. |
| [2] | Aksenov I L;Vakula S I;Strelinitskii V E .High-efficiency source of pure carbon plasme[J].Soviet Physics-Technical Physics,1980,25(09):1164-1169. |
| [3] | Mckenzie D R;Muller D;Pailthorpe B A .Compressive stress induced formation of thin film tetrahedral amorphous carbon[J].Physical Review Letters,1991,67(06):773-776. |
| [4] | M. Hakovirta;V. -M. Tiainen;P. Pekko .Techniques for filtering graphite macroparticles in the cathodic vacuum arc deposition of tetrahedral amorphous carbon films[J].Diamond and Related Materials,1999(7):1183-1192. |
| [5] | Lossy R;Pappas D L;Roy R A et al.Properties of amorphous diamond films prepared by a filtered cathodic arc[J].Journal of Applied Physics,1995,77(09):4750-4756. |
| [6] | Arena C. .Electronic and topographic structure of ta-C, ta-C: N and ta-C:B investigated by scanning tunnelling microscopy[J].Diamond and Related Materials,1999(2 Mar):435-439. |
| [7] | Ishikawa J;Takeiri Y;Ogawa K et al.Transparent carbon film prepared by mass-separated negative carbon ion beam deposition[J].Journal of Applied Physics,1987,61:2509-2513. |
| [8] | Peeler D T;Murray P T .Dynamics of amorphous carbon film growth by pulsed laser deposition:kinetic energy of the incident particles[J].Diamond and Related Materials,1994,3:1124-1127. |
| [9] | Lifshitz Y;Lempert G D;Grossman et al.Substantiation of subplantation model for diamondlike film growth by atomic force microscopy[J].Physical Review Letters,1994,72(17):2753-2756. |
| [10] | Lifshitz Y;Lempert G D;Grossman E et al.Growth mechanisms of DLC films from C+ ions:experimental studies[J].Diamond and Related Materials,1995,4:318-323. |
| [11] | Hirvonen J P;Koskinen J;Lappalainen R et al.Preparation and properties of high-density hydrosen-free hard carbon films with direct ion beam or arc discharge deposition[J].Materials Science Forum,1990,52-53:197-200. |
| [12] | Fallon P J;Veerasamy V S;Davis C A et al.Properties of filtered ion beam deposited diamondlike carbon as a function of ion energy[J].Physical Review B,1993,48(07):4777-4782. |
| [13] | Gilkes K W R;Gaskell P H;Yuan J .Atomic structure of tetrahedral amorphous carbon[J].Journal of Non-Crystalline Solids,1993,164-166:1107-1110. |
| [14] | Gaskell P H;Saeed A;Chieux P et al.Neutron scattering studies of the structure of highly tetrahedral amorphous carbon[J].Physical Review Letters,1991,67(10):1286-1289. |
| [15] | Kalish R;Lifshitz Y;Nugent K et al.Thermal stability and relaxation in diamond-like-carbon.A Raman study of films with different sp3 fractions[J].Applied Physics Letters,1999,74(20):2936-2938. |
| [16] | Dihu Chen;Aixiang Wei;S. P. Wong;Shaoqi Peng;J. B. Xu;I. H. Wilson .Synthesis and microstructural properties of tetrahedral amorphous carbon films[J].Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites,1999(0):161-166. |
| [17] | Hakovirta M .Hardmetal woodcuting tool tips coated with tetrahedral amorphous carbon[J].Diamond and Related Materials,1999,8:1225-1228. |
| [18] | Endler I. .Preparation and wear behaviour of woodworking tools coated with superhard layers[J].Diamond and Related Materials,1999(2 Mar):834-839. |
| [19] | B. K. Tay;X. Shi;E. J. Liu;H. S. Tan;L. K. Cheah;W. I. Milne .Heat treatment of tetrahedral amorphous carbon films grown by filtered cathodic vacuum-arc technique[J].Diamond and Related Materials,1999(7):1328-1332. |
| [20] | Robertson J .Electron affinity of carbon systems[J].Diamond and Related Materials,1996,5:797-801. |
| [21] | B. S. Satyanarayana;A. Hart;W. I. Milne .Field emission from tetrahedral amorphous carbon[J].Applied physics letters,1997(9/12):1430-1432. |
| [22] | Veerasamy V S;Amaratunga G A J;Mline W I .Optical and electronic properties of amorphous diamond[J].Diamond and Related Materials,1993,2:782-787. |
| [23] | Lappalainen R;Pekko P .Tetrahedral amorphous carbon coatings for processing tools to reduce contamination in the analysis of trace elements[J].Diamond and Related Materials,1997,6:1207-1209. |
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