采用电子回旋共振微波等离子体化学气相沉积技术(ECR-CVD),以Fe3O4纳米粒子为催化剂,CH4 、B2H6和H2为气源,在多孔硅基底上制备出了掺硼碳纳米管.研究了不同B2H6/CH4气体配比对碳纳米管生长特性的影响.使用扫描电子显微镜(SEM)、透射电子显微镜(TEM)和X射线光电子谱(XPS)对样品的形貌、结构及组分进行表征.结果表明:B2H6对纳米管的生长具有较大影响.气源中含有少量的B2H6就会破坏纳米管的定向生长,使纳米管变得弯曲;随着气源中B2H6比例的增加,纳米管结构从中空结构转变为类竹节结构,多壁管外径由60 nm～90 nm增大至200 nm～250 nm,管壁由10 nm～20 nm增厚至70 nm～100 nm,表面变得粗糙,同时纳米管的生长速度降低;纳米管中的B/C原子比随着B2H6比例的增大而增大,当B2H6/CH4体积配比为2:1时B/C原子比增至28:72.
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