为了探讨膜厚对四面体非晶碳薄膜拉曼结构表征和内应力的影响规律,进而确定应力与拉曼光谱之间的关系,采用过滤阴极真空电弧技术以相同的工艺条件在P(100)单晶抛光硅衬底上制备了从3nm~350nm不同厚度的四面体非晶碳薄膜.利用表面轮廓仪和原子力显微镜测试膜厚,表面轮廓仪确定曲率半径并计算薄膜应力,共聚焦拉曼光谱表征薄膜的结构细节.实验发现,随着膜厚的增加,四面体非晶碳薄膜的应力持续下降,当膜厚超过30nm时,应力的下降趋势变得平缓,并保持在小于5 GPa的较低水平.随着膜厚的增加,可见光拉曼光谱中衬底硅的一阶和二阶谱峰强度逐渐降低,在50nm~80nm膜厚范围,半高宽最窄,峰强最高,能够最有效地获得拉曼结构信息.随着膜厚的增加和应力的下降,非晶碳一阶谱峰的峰位表现为逐渐向低频偏移.
参考文献
[1] | 魏爱香,周友国.四配位非晶碳薄膜的研究进展[J].新型炭材料,2000(04):75-79. |
[2] | Robertson J .Diamond-like amorphous carbon[J].Materials Science and Engineering,2002,R37:129-281. |
[3] | Prawer S.;Jamieson DN.;Orwa JO.;Bursill LA.;Peng JL.;Nugent KW. .The Raman spectrum of nanocrystalline diamond[J].Chemical Physics Letters,2000(1/2):93-97. |
[4] | 成会明.纳米碳管制备、结构、物性及应用[M].北京:化学工业出版社,2002:119-169. |
[5] | Belov AY.;Jager HU. .Elastic constants of tetrahedral amorphous carbon films: the effect of intrinsic stresses[J].Surface & Coatings Technology,2002(0):128-132. |
[6] | 朱嘉琦,王景贺,孟松鹤,韩杰才,张连生.不同能级加速过滤电弧沉积四面体非晶碳膜的结构和性能[J].物理学报,2004(04):1150-1156. |
[7] | S. Logothetidis;P. Patsalas;M. Gioti;A. Galdikas;L. Pranevicius .Growth kinetics of sputtered amorphous carbon thin films: composition studies and phenomenological model[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(1/2):56-66. |
[8] | Fran ois Rossi;Bernard Andr;van Veen A et al.Effect of ion beam assistance on the microstructure of nonhydrogenated amorphous carbon[J].Journal of Applied Physics,1994,75(06):3121-3129. |
[9] | Takeo Miyazawa;Shunji Misawa;Sadafumi Yoshida et al.Preparation and structure of carbon film deposited by a mass-separated C+ion beam[J].Journal of Applied Physics,1984,55(01):188-193. |
[10] | Gupta B K;Bhushan B .Micromechanical propertes of amorphous carbon coatings deposited by different deposition techniques[J].Thin Solid Films,1995,270(1-2):391-398. |
[11] | D. Sheeja;B.K. Tay;K.W. Leong;C.H. Lee .Effect of film thickness on the stress and adhesion of diamond-like carbon coatings[J].Diamond and Related Materials,2002(9):1643-1647. |
[12] | Roth T H;Kloos K H;Broszeit E .Structure,internal stresses,adhesion and wear resistance of sputtered alumina coatings[J].Thin Solid Films,1987,153:123-133. |
[13] | McKenzie D R;Muller D;Pailthorpe B A .Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon[J].Physical Review Letters,1991,67:773-776. |
[14] | M. C. Polo;J. L. Andujar;A. Hart;J. Robertson;W. I. Milne .Preparation of tetrahedral amorphous carbon films by filtered cathodic vacuum arc deposition[J].Diamond and Related Materials,2000(3-6):663-667. |
[15] | Friedmann TA;Sullivan JP;Knapp JA;Tallant DR;Follstaedt DM;Medlin DL;Mirkarimi PB;Sandia Natl Labs Livermore CA 94551 USA. .Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond[J].Applied physics letters,1997(26):3820-3822. |
[16] | K. W. R. Gilkes;S. Prawer;K. W. Nugent .Direct quantitative detection of the sp~(3) bonding in diamond-like carbon films using ultraviolet and visible Raman spectroscopy[J].Journal of Applied Physics,2000(10):7283-7289. |
[17] | Davis CA.;Knowles KM.;Amaratunga GAJ. .Growth mechanism and cross-sectional structure of tetrahedral amorphous carbon thin films[J].Physical review letters,1998(15):3280-3283. |
[18] | Zhao JP.;Chen ZY. .Sandwich atomic structure in tetrahedral amorphous carbon: Evidence of subplantation model for film growth from hyperthermal species - art. no. 115318[J].Physical Review.B.Condensed Matter,2001(11):115318-1-115318-9. |
[19] | Jianjun Dong;Drabold D A .Ring formation and the structurai and electronic properties of tetrahedral amorphous carbon surfaces[J].Physical Review B,1998,57:15591-15598. |
[20] | Gerstner E G;McKenzie D R;Puchert M K et al.Adherent carbon film deposition by cathodic arc with implantation[J].Journal of Vacuum Science and Technology A-Vacuum Surfaces and Films,1995,13(02):406. |
[21] | S. Waidmann;M. Knupfer;J. Fink;B. Kleinsorge;J. Robertson .High-resolution electron energy-loss spectroscopy of undoped and nitrogen-doped tetrahedral amorphous carbon films[J].Diamond and Related Materials,2000(3-6):722-727. |
[22] | 金曾孙,姜志刚,胡航,曹庆忠.热阴极DC-PCVD方法制备的金刚石厚膜的生长特性和内应力[J].新型炭材料,2003(01):65-68. |
[23] | Pierson H O.Handbook of Carbon,Graphite,Diamond and Fullerenes-Properties,Processing and Applications[M].Noyes:William Andrew Publishing,1993:43. |
[24] | 程光煦.拉曼、布里渊散射-原理及应用[M].北京:科学出版社,2001:382-387. |
[25] | Joel W;Ager Ⅲ;Simone Anders;Andre Anders et al.Effect of intrinsic growth stress on the Raman spectra of vacuum-arcdeposited amorphous carbon films[J].Applied Physics Letters,1995,66:3444-3446. |
[26] | Jin-Koog Shin;Churl Seung Lee;Kwang-Ryeol Lee;Kwang Yong Eun .Effect of residual stress on the Raman-spectrum analysis of tetrahedral amorphous carbon films[J].Applied physics letters,2001(5):631-633. |
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