采用电子辅助化学气相沉积法(EA-CVD)制备了氮掺杂金刚石膜,用SEM、Raman光谱、XPS、EPR等测试手段研究了金刚石薄膜的品质和膜中的氮杂质状态.结果表明,随着氮气流量的增加,金刚石膜的形貌从完整的晶面逐渐变为与(100)面共存的"菜花状",且非晶碳的含量增加,品质下降.金刚石膜中氮以Ns0、[N-V]0和[N-V]-1的形式存在,在较低氮气流量下[N-V]0和[N-V]-1的含量较多,Ns0氮杂质的质量分数在1.50×10-～4.83×10-4之间变化.
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