报道了用反应溅射法制备TiO2膜的实验研究.详细研究了膜的沉积、膜结构及其光学性质,随溅射氧分压的变化.随氧分压由6×10-2 Pa增加到9×10-2 Pa时,晶体结构由金红石变到锐钛矿,氧分压超过9×10-2 Pa时趋向于无定形结构.与膜结构密切相关的折射率n随氧分压的增大由2.44变到1.96,禁带宽度Eg则由大变小,然后再增大的变化(3.41→3.26→3.42).
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