对近年来有关 LiNbO3薄膜的制备方法、性能及应用前景作了综述.比较详细地阐述了LiNbO3薄膜的几种主要制备方法及其优缺点,分析了用这些方法制成的LiNbO3薄膜的性能,简要地介绍了LiNbO3薄膜的一些应用,展望了LiNbO3薄膜的发展前景.
参考文献
[1] | 徐国跃,郭新立,刘俊明.(001)SiO2衬底上LiNbO3光波导薄膜的制备[J].南京航空航天大学学报,1999(02):223-226. |
[2] | HU W S;Lin Z G;Guo X L et al.Pulsed laser deposition of (001) texture LiNbO3 films on Al2O3/SiO2/Si substrate[J].Applied Surface Science,1999,141(1-2):197-200. |
[3] | Shibata Y et al.Strain mechanism of LiNbO3/sappire heterostructure grown by pulsed laser deposition[J].Japanese Journal of Appl,1997(36):7344-7347. |
[4] | Kawagnchi T;Yoon D H;Minakata M et al.Fabrication of thin-film waveguide QPM-SHG device by domain-inverted liquid-phase exipaxy[J].Journal of Crystal Growth,1998,191:152-129. |
[5] | Yamada A;Tanada H;Satioh M.Photorefractive damage in LiNbO3 thin films optical waveguides grown by liquid phase epitaxy[J].Journal of Appl,1994:76;1776. |
[6] | Kawaguchi T.;Minakata M.;Okada Y.;Imaeda M.;Fukuda T.;Yoon DH. .GROWTH OF HIGH CRYSTALLINE QUALITY LINBO3 THIN FILMS BY A NEW LIQUID PHASE EPITAXIAL TECHNIQUE FROM A SOLID-LIQUID COEXISTING MELT[J].Journal of Crystal Growth,1995(1/2):87-93. |
[7] | Lu D X.Physical and optical properties of sputtered lithium niobate thin films[A].,1996:361-368. |
[8] | Park S K;Baek M S;Bac S C et al.(012) orientation of LiNbO3 films fabricated by rf magnetron sputtering[J].Ungyong Mulli,1999,12(02):117-122. |
[9] | Shimizu M;funshima Y;Nishida T et al.Preparation and optical waveguide properties of LiNbO3 thin films by RF magnetron sputtering[J].Japanese Journal of Applied Physics,1993(32):4111-4114. |
[10] | Sadashita Y;Segawa H .Preparation and characterization of LiNbO3 thin films produced by chemical-vapor deposition[J].Journal of Applied Physics,1995,77(11):5995. |
[11] | Feigelson RS. .EPITAXIAL GROWTH OF LITHIUM NIOBATE THIN FILMS BY THE SOLID SOURCE MOCVD METHOD[J].Journal of Crystal Growth,1996(1/4):1-16. |
[12] | S. Y. Lee;R. S. Feigelson .c-axis lithium niobate thin film growth on silicon using solid-source metalorganic chemical vapor deposition[J].Journal of Materials Research,1999(6):2662-2668. |
[13] | Lee S Y;Route R K;Feigelson R S.Growth of lithium niobate thin film by solid source MOCVD[A].,1996:178-185. |
[14] | Lu Z;Hiskes R;Dicarclis S A .Eptitaxial LiNbO3 thin films on sappire substrates grown by solid source MOCVD[J].Journal of Materials Research,1994,9(09):2258-2263. |
[15] | Rao A P;Paik D S;Komarneni S .Sol-gel synthesis of lithium niobate powder and thin fihim using lithium 2,4-pentanedionate as lithium source[J].Journal of Electroceramics,1998,2(03):157-162. |
[16] | Nashimoto K;Moriyama H;Osakabe E .Control of crystallinity in sol-gel derived epitaxial LiNbO3 thin films on sapphire[J].Japanese Journal of Applied Physics Part 2,1996(35):4936-4940. |
[17] | Ono S.;Hirano S.;Takeo T. .PROCESSING OF HIGHLY ORIENTED LINBO3 FILMS FOR WAVEGUIDES FROM AQUEOUS SOLUTION[J].Journal of the American Ceramic Society,1996(5):1343-1350. |
[18] | Satomi Ono;Shin-ichi Hirano .Synthesis of highly oriented lithium niobate thin film from neutralized aqueous precursor solution[J].Journal of the American Ceramic Society,1997(11):2869-2875. |
[19] | Ono S.;Unger W.;Takeichi Y.;Hirano S.;Bose O. .Characterization of lithium niobate thin films derived from aqueous solution[J].Journal of the American Ceramic Society,1998(7):1749-1756. |
[20] | DEROUIN T A;Lakeman C D E;Wu X H et al.Effect of lattice mismatch on the epitaxy of sol-gel LiNbO3 thin films[J].Journal of Materials Research,1997,12(05):1391-1400. |
[21] | 肖定全.铁电薄膜,一个十分活跃的研究领域[J].材料导报,1993(05):33-37. |
[22] | 周济;张孝文.集成铁电学:信息材料的前沿领域[J].材料导报,1992(06):3-8. |
[23] | 姚熹.铁电陶瓷薄膜与薄膜器件[J].材料导报,1992(06):13-17. |
[24] | 王弘,王民.铁电薄膜与集成铁电学[J].高技术通讯,1995(01):53-58. |
[25] | Aboullei M M;Leonberger J L .Waveguides in lithium Niobate[J].Journal of the American Ceramic Society,1989,72(08):1311-1321. |
[26] | 王志坚;杨家祥 .LiNbO3薄及LiTiO3晶体的光折变性能研究[J].安徽大学学报(自然科学版),1997,21(04):27-31. |
[27] | Bosso S S.Applications of lithiunm niobate intergrated optic in telecommunication systemns[A].,1999:34-37. |
[28] | 邓亮,田莳.航空航天颂域中有广泛应用前景的铁电薄膜[J].材料工程,1995(03):12. |
[29] | 朱信华,刘治国.铁电薄膜、多层膜及异质结构研究[J].物理,1999(02):68. |
[30] | Marsh A M;Markness S D;Qian F;Singh R K .Pulsed laser deposition of high quality LiNbO3 films on sappire substrates[J].Applied Physics Letters,1993,62(09):952-954. |
[31] | Ogale S B;Dikshit R N;Dikshit S J et al.Pulsed laser deposition of stoichiometric LiNbO3 thin films by using O2 and Ar mixtures as ambients[J].Journal of Applied Physics,1992,71(11):5718-5720. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%