研究载荷水平,加/卸载速率以及硼掺杂对硅多形性相转变的影响,并粗略勾画出压力诱导硅相转变图.高掺杂明显增加了非晶硅的形成范围.表明掺杂降低了晶体硅的相稳定性.初步的相变动力学分析表明,室温下这类多形性相转变很可能是通过无成分变化的相界面原子重组实现的,而不是长程或跨越一两个原子层的短程扩散.
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