采用355nm脉冲激光沉积(PLD)法制备了室温离子电导率为1.6×10-6S/cm的LiPON电解质薄膜.用X射线衍射(XRD)、扫描电子显微镜(SEM)、傅立叶变换红外光谱(FTIR)、X射线光电子能谱(XPS)等方法对薄膜的结构和形貌进行表征,讨论了LiPON薄膜的电化学性能与其结构之间的关系.结果表明,该薄膜是一种无针孔、无裂缝、厚度均匀的非晶态结构.N元素插入到Li3PO4中,取代P-O-P和PO3结构中的O使N与P成键形成P-N=P或P-N()P P,增加了薄膜中的网状结构,从而提高了离子电导率.另外,随着N含量增大,LiPON薄膜的室温离子电导率增大.
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