采用SEM和XRD法,分析了磁控溅射CrTiAlN梯度镀层的表面与断口形貌及其相组成随加热温度的变化规律.研究表明:CrTiAlN镀层在600℃之前物相和组织结构保持稳定,随后的升温过程中有相变行为,随着温度的升高,物相由以致密的非晶态物质为主,依次出现CrN、Cr2O3相和AlN等物相;相变的发生有利于镀层保持高温硬度和结合力.加热至900℃时,尽管在镀层表面观察到微区融化现象,但膜基结合紧密;加热至1100℃时镀层表面出现开裂并伴有剥落现象.从温度对镀层的氧化形貌及物相、组织转变机理分析,CrTiAlN梯度镀层在≤900℃时有良好的热稳定性.
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