应用化学气相沉积(CVD)方法在铝表面形成SiOx陶瓷涂层,通过弯曲实验研究了涂层与基体的结合性能.利用扫描电子显微镜(SEM)观察了弯曲部位的表面形貌,弯曲过程表述为表面凹坑与内部孔洞联合长大,形成长条裂纹状沟槽或突脊,最后裂纹长大直至断裂.研究表明,基底与膜层结合良好,形成高结合力的原因是铝基底与表面SiOx膜层间过渡层中的Al-O与Si-O键合能很高,键合稳定.
参考文献
| [1] | 王福贞.气相沉积技术[J].表面工程,1991(01):48. |
| [2] | 谭昌瑶;王钧石.实用表面工程技术[M].北京:新时代出版社,1998:279-280. |
| [3] | 徐滨士;刘世修.表面工程[M].北京:机械工业出版社,2000:228-231. |
| [4] | 中国机械工程学会热处理学会.表面沉积技术[M].北京:机械工业出版社,1987:98-101. |
| [5] | 曾晓雁.表面工程学[M].北京:机械工业出版社,2000:236. |
| [6] | Cote D R;Nguyen S V;Stamper A K et al.Plasma-assisted chemical vapor deposition of dielectrics thin films for ULSI semicoductor circuits[J].IBM Journal of Research and Development,1999,43(1-2):5. |
| [7] | Nguyen S V .High-density plasma chemical vapor deposition of silicon-based dielectric films for integrated circuits[J].IBM Journal of Research and Development,1999,43(1-2):109. |
| [8] | Garlson D E;Magee G W;Triano A R .The effect of hydrogen content on the photovoltaic properties of amorphous Silicon[J].Solid-State Science and Technology,1979,126(04):688. |
| [9] | Aceves M;Pedraza J;Reynoso-Hernandez J A.Study on the Al/silicon rich oxide/Si structure as a surge suppresser[J].Integrated Reliability Workshop Final Report 1997 IEEE International,1997(10):132-133. |
| [10] | Saleh;Adli A .Characterization of SiOx Ny anti-reflective coatings using SIMS and RBS/HFS[J].Thin Solid Films,1999,355:363-366. |
| [11] | Shibata Noboru .Properties and time dependences of silicon oxynitride films deposited by low-temperature photochemical vapor deposition[J].Japanese Journal of Applied Physics Part 1,1995,34(8A):4024-4025. |
| [12] | Aceves M.;Reynoso-Hernandez J.A.;Falcony C.;Calleja W.;Pedraza J. .Study on the Al/silicon rich oxide/Si structure as a surge suppressor, DC, frequency response and modeling[J].Microelectronics journal,1999(9):855-862. |
| [13] | Cabrera A L;Kirner J F;Armor J N .Si diffusion coating on steels by SiH4/H2 treatment for high temperature oxidation protection[J].Journal of Materials Research,1990,6(01):71-78. |
| [14] | 张际亮,郦剑,沃银花,王幼文,沈复初,甘正浩.铝表面化学气相沉积SiOx膜层的显微结构和性能[J].中国有色金属学报,2004(06):961-966. |
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