利用Nd-YAG激光器(波长为1064nm,频率为10Hz)做光源,采用纯金属锌靶,以Si(111)为基体在有氧的气氛中通过激光烧蚀锌靶表面来制备氧化锌薄膜,研究基体温度对ZnO薄膜结构及发光性能的影响.通过XRD和AFM原子力显微镜来表征氧化锌薄膜的结构和表面形貌,其光学性质由光致发光谱来表征.结果表明:在450-550 ℃的条件下沉积的ZnO薄膜具有c-轴择优取向,500℃时c-轴取向最明显.具有c-轴取向的ZnO薄膜具有强的紫外光发射和弱的绿光发射,发光中心在518nm处的黄绿光发射主要归因于电子从导带底部到氧位错缺陷OZn能级之间的跃迁.
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