综述了钛酸锶铅(PST)铁电薄膜目前最常用的4种制备工艺:溶胶-凝胶(Sol-gel)法、磁控溅射(Magnetron Sputtering)、脉冲激光沉积(PLD)和金属有机化学气相沉积(MOCVD),并简要介绍了PST目前的研究进展以及PST薄膜在铁电移相器、动态随机存储器(DRAM)和热释电红外探测器方面的应用,提出了发展展望.
参考文献
| [1] | Boyu Ni;Dongwen Peng;Wenbiao Wu.Tunable Properties of PbxSr1-xTiO3 Thin Films[A].Bellingham,2004:250-253. |
| [2] | M. Jain;S.B. Majumder;R. Guo .Synthesis and characterization of lead strontium titanate thin films by sol-gel technique[J].Materials Letters,2002(5):692-697. |
| [3] | Yoshitaka Somiya;Amar S. Bhalla;L. Eric Cross .Study of (Sr, Pb)TiO_3 ceramics on dielectric and physical properties[J].International journal of inorganic materials,2001(7):709-714. |
| [4] | 隋帅 .Sol-Gel法Mg掺杂PST薄膜的制备[D].杭州:浙江大学,2005. |
| [5] | Kyoung-Tae Kim;Chang-Il Kim .Dielectric properties of highly (100) oriented (Pb_(0.5), Sr_(0.5))TiO_3 thin films grown on LaNiO_3 electrodes[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2004(1):651-655. |
| [6] | Kyoung-Tae Kim;Chang-ll Kim .Dielectric properties of highly (100) oriented (Pb_(0.5),Sr_(0.5))TiO_3 thin films grown on Si with MgO buffer layer[J].Journal of Vacuum Science & Technology, B. Microelectronics and Nanometer Structures: Processing, Measurement and Phenomena,2004(6):2615-2619. |
| [7] | Tadashi FUJII;Masatoshi ADACHI .Preparation of (Pb,Sr)TiO_3 Films by Sol-Gel Technique[J].Japanese journal of applied physics,2005(1b):692-694. |
| [8] | Martinez E;Blanco O;Fundora A.Lead Deficient PST Thin Films on LSCO/SrTiO3 by RF Sputtering[A].,2004:153-158. |
| [9] | KARAKI T;Du J;Tsu K et al.Field Dependence of Dielectric Properties of(Pb,Sr)TiO3 thin Films[J].FERROELECTRICS,2002,271:303-308. |
| [10] | KARAKI T;Du J;FUJII T et al.Electrical Properties of Epitaxial (Pb,Sr)TiO3 Thin Films Prepared by RF Magnetron Sputtering[J].Japanese Journal of Applied Physics,2002,41(11B):6761-6764. |
| [11] | 孙平,王茂祥,孙,彤,舒庆.磁控溅射制备（Pb1-xSrx）TiO3系铁电薄膜的实验研究[J].真空科学与技术学报,2001(04):326-328. |
| [12] | Jain M;Bhattacharya P;Yu I Yuzyuk.Structure and Electrical Investigations of Ferroelectric Lead Strontium Titanate Thin Films and Ceramics[A].,2004:225-230. |
| [13] | Y. Lin;X. Chen;S. W. Liu;C. L. Chen;Jang-Sik Lee;Y. Li;Q. X. Jia;A. Bhalla .Anisotropic in-plane strains and dielectric properties in (Pb,Sr)TiO_(3) thin films on NdGaO_(3) substrates[J].Applied physics letters,2004(4):577-579. |
| [14] | Xu H;Shen MR;Fang L;Yao DL;Gan ZQ .Relaxor-like dielectric behavior of pulsed-laser-deposited Pb0.5Sr0.5TiO3 films[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2005(1/2):197-202. |
| [15] | Chung H J;Woo S I .Electrical Characteristics of(Pb,Sr) TiO3 Thin Films for Ultra-large-scale Integrated Dynamic Random Access Memory Capacitors Prepared by Liquidsource-misted Chemical Deposition[J].Journal of Vacuum Science and Technology B:Microelectronics and Nanometer Structures,2001,19(01):275-280. |
| [16] | M. W. Cole;P. C. Joshi;M. H. Ervin;M. C. Wood;R. L. Pfeffer .The influence of Mg doping on the materials properties of Ba{sub}(1-x)Sr{sub}xTiO{sub}3 thin films for tunable device applications[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(1):34-41. |
| [17] | M. Jain;N. K. Karan;R. S. Katiyar;A. S. Bhalla;F. A. Miranda;F. W. Van Keuls .Pb_(0.3)Sr_(0.7)TiO_(3) thin films for high-frequency phase shifter applications[J].Applied physics letters,2004(2):275-277. |
| [18] | Kim GH;Kim KT;Kim DP;Kim CI .Etching mechanism of (Pb,Sr)TiO3 thin films for DRAM application using Cl-2/Ar inductively coupled plasma[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2004(3/4):485-489. |
| [19] | Hyun Jin Chung;Suk Jin Chung;Jin Hong Kim;Seong Ihl Woo .The effect of post-annealing on the electrical properties of (Pb,Sr)TiO{sub}3 thin films prepared by liquid source misted chemical deposition for ultra large-scale integration (ULSI) dynamic random access memory (DRAM) capacitor[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2001(1/2):213-218. |
| [20] | 王茂祥 .UFPA用PST铁电材料及电脉冲读出模式红外探测器的研制[D].东南大学,2001. |
| [21] | Kyoung-T. Kim;Chang-I. Kim .Structure and dielectrical properties of (Pb,Sr)TiO_3 thin films for tunable microwave device[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2002(12):544-547. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%