欢迎登录材料期刊网

材料期刊网

中国科学院金属研究所 科学出版社
高级检索
  1. 首页
  2. 期刊
  3. 绝缘材料
  4. 钛酸锶钡铁电薄膜的制备与性能优化研究

绝缘材料, 2007, 40(4): 24-28. doi: 10.3969/j.issn.1009-9239.2007.04.007

钛酸锶钡铁电薄膜的制备与性能优化研究

王波 1, , 杨传仁 2, , 陈宏伟 3, , 张继华 4, , 余桉 5, , 张瑞婷 6,

1.电子科技大学,电子薄膜与集成器件国家重点实验室,成都,610054

2.电子科技大学,电子薄膜与集成器件国家重点实验室,成都,610054

3.电子科技大学,电子薄膜与集成器件国家重点实验室,成都,610054

4.电子科技大学,电子薄膜与集成器件国家重点实验室,成都,610054

5.电子科技大学,电子薄膜与集成器件国家重点实验室,成都,610054

6.电子科技大学,电子薄膜与集成器件国家重点实验室,成都,610054

基金项目:   国家重点基础研究发展计划(973计划)(Z201)  

关键词： 钛酸锶钡(BST) , 铁电薄膜 , 制备工艺 , 性能优化

Status of Research on the Preparation and the Properties Optimization of BaxSr1-xTiO3 Ferroelectric Thin Films

综述了目前钛酸锶钡(BST)铁电薄膜最为常用的4种制备工艺:磁控溅射法(Magnetron Sputtering)、脉冲激光沉积法(PLD)、溶胶-凝胶法(Sol-gel)、金属有机物化学气相沉积法(MOCVD).并介绍了在优化BST铁电薄膜性能方面所作的工作和取得的成果.

参考文献

[1] Setter N;Damjanovic D;Eng L;Fox G;Gevorgian S;Hong S;Kingon A;Kohlstedt H;Park NY;Stephenson GB .Ferroelectric thin films: Review of materials, properties, and applications[J].Journal of Applied Physics,2006(5):51606-1-51606-46-0.
[2] P. Padmini;T. R. Taylor;M. J. Lefevre;A. S. Nagra;R. A. York;J. S. Speck .Realization of high tunability barium strontium titanate thin films by rf magnetron sputtering[J].Applied physics letters,1999(20):3186-3188.
[3] Jin Xu;Wolfgang Menesklou;Ellen Ivers-Tiffée .Processing and Properties of BST Thin Films for Tun-able Microwave Devices[J].Journal of the European Ceramic Society,2004,24:1735-1739.
[4] W. J. Kim;H. D. Wu;W. Chang .Microwave dielectric properties of strained (Ba_(0.4)Sr_(0.6))TiO_(3) thin films[J].Journal of Applied Physics,2000(9):5448-5451.
[5] Park BH.;Fan Y.;Jia QX.;Lu P.;Gim Y. .High nonlinearity of Ba0.6Sr0.4TiO3 films heteroepitaxially grown on MgO substrates[J].Applied physics letters,2000(16):2587-2589.
[6] Valentin Cracium;Doina Cracium;Joshua M Howard.Ultraviolet-assisted Plused Laser Deposition:a New Technology for the Growth of Thin Films at Medium and Low Temperatures[A].,2001:205-214.
[7] Gaidi M;Chake M;Ndione P F et al.Microstructure and Optical Properties of Ba0.5Sr0.5TiO3 Thin Film Deposited by Pulsed Laser Deposition for Low Loss Waveguide Application[J].Journal of Applied Physics,2007,101:063107.
[8] 李桂英,余萍,肖定全,王欢.一种SOL-GEL制备钛酸锶钡(BST)薄膜新路线的工艺研究[C].四川大学学报(自然科学版)（第十一届全国电介质物理、材料与应用学术会议：论文专辑）,2005:460-463.
[9] S.U. Adikary;H.L.W. Chan .Ferroelectric and dielectric properties of sol―gel derived Ba_xSr_(1-x)TiO_3 thin films[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2003(1):70-74.
[10] Xiaohua Sun;Bailin Zhu;Tao Liu;Meiya Li;Xing-Zhong Zhao;Danyang Wang;Chengliang Sun;Helen L. W. Chan .Dielectric and tunable properties of K-doped Ba_(0.6)Sr_(0.4)TiO_(3) thin films fabricated by sol-gel method[J].Journal of Applied Physics,2006(8):084103-1-084103-6-0.
[11] Regnery S;Ding Y;Ehrhart P et al.Metal-organic Chemical-vapor Deposition of (Ba,Sr)TiO3:Nuxleation and Growth on Pt-(111)[J].Journal of Applied Physics,2005,98:084904.
[12] MI-HWA LIM;HYUN-SUKKIM;NAN-YOUNG KIM;HO-GIKIM;IL-DOO KIM;SEUNG EON MOON;MIN-HWAN KWAK;HAN-CHEOL RYU;SU-JAE LEE .Frequency and Voltage Dependent Dielectric Properties of Ni-doped Ba{sub}0.6Sr{sub}0.4TiO{sub}3 Thin Films[J].Journal of electroceramics,2004(1/3):239-243.
[13] Kyoung-Tae Kim;Chang-Il Kim .Structure and dielectric properties of Bi-doped Ba_(0.6)Sr_(0.4)TiO_3 thin films fabricated by sol―gel method[J].Microelectronic engineering,2003(1/4):835-841.
[14] Wang S Y;Cheng B L;Can Wang et al.Raman Spectroscopy Studies of Ce-doped Effects on Ba0.5Sr0.5TiO3 Thin Films[J].Journal of Applied Physics,2006,99:013504.
[15] Ruey-Ven Wang;Paul C. Mclntyre;John D. Baniecki;Kenji Nomura;Takeshi Shioga;Kazuaki Kurihara;Masatoshi Ishii .Effect of Y doping and composition-dependent elastic strain on the electrical properties of (Ba,Sr)TiO_3 thin films deposited at 520℃[J].Applied physics letters,2005(19):192906.1-192906.3.
[16] Il-Doo Kim;Harry L. Tuller;Hyun-Suk Kim;Jin-Seong Park .High tunability (Ba,Sr)TiO_(3) thin films grown on atomic layer deposited TiO_(2) and Ta_(2)O_(5) buffer layers[J].Applied physics letters,2004(20):4705-4707.
[17] Tomoaki Yamada;Paul Muralt;Vladimir O Sherman et al.Epitaxial Growth of Ba0.3Sr0.7TiO3 Thin Films on Al2O3(0001) Using Ultrathin TiN Layer as Sacrificial Template[J].Applied Physics Letters,2007,90:142911.
[18] Weicheng Zhu;Jinrong Cheng;Shengwen Yu;Jia Gong;Zhongyan Meng .Enhanced tunable properties of Ba_(0.6)Sr_(0.4)TiO_(3) thin films grown on Pt/Ti/SiO_(2)/Si substrates using MgO buffer layers[J].Applied physics letters,2007(3):032907-1-032907-3-0.
[19] Zhu X;Lu S;Chan H L W et al.Microstructures and Dielectric Properties of Compositionally Graded (Ba1-xSrx)TiO3 Thin Films Prepared by Pulsed Laser Deposition[J].Applied Physics A:Materials Science and Processing,2003,76:225-229.
[20] X. Zhu;H. L. W. Chan;C. L. Choy;K. H. Wong;J. Xu;S. Shi .Preparation of epitaxial compositionally graded (Ba_(1-x)Sr_x) TiO_3 thin films with enhanced dielectric properties[J].Applied physics, A. Materials science & processing,2003(3/4):499-505.
[21] Zhong S;Alpay SP;Cole MW;Ngo E;Hirsch S;Demaree JD .Highly tunable and temperature insensitive multilayer barium strontium titanate films[J].Applied physics letters,2007(9):92901-1-92901-3-0.
[22] 唐逸,杨春生,张丛春.氧分压对磁控溅射BST薄膜及其介电性能的影响[J].上海交通大学学报,2006(01):108-111.
[23] Jaemo Im;O. Auciello;P. K. Baumann .Composition-control of magnetron-sputter-deposited (Ba_(x)Sr_(1-x))Ti_(1+y)O_(3+z) thin films for voltage tunable devices[J].Applied physics letters,2000(5):625-627.
[24] Navi N;Horwitz JS;Auyeung RCY;Qadri SB;Wu HD .Microwave dielectric properties of W-doped Ba0.6Sr0.4TiO3 thin films grown on (001)MgO by pulsed laser deposition with a variable oxygen deposition pressure[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2006(1/2):115-118.
[25] Seung Eon Moon;Eun-kyoung Kim;Min-Hwan Kwak et al.Orientation Dependent Microwave Dielectric Proper ties of Ferroelectric Ba1-xSrxTiO3 Thin Films[J].Applied Physics Letters,2003,83(11):2166-2168.
[26] James S. Horwitz;Wontae Chang;Wonjeong Kim;Syed B. Qadri;Jeffrey M. Pond;Steven W. Kirchoefer;Douglas B. Chrisey .The effect of stress on the microwave dielectric properties of Ba{sub}0.5Sr{sub}0.5TiO{sub}3 thin films[J].Journal of electroceramics,2000(2/3):357-363.
[27] Te-Hua Fang;Win-Jin Chang;ChaoMing Lin .Effect of annealing on the structural and mechanical properties of Ba_(0.7)Sr_(0.3)TiO_3 thin films[J].Materials Science & Engineering, A. Structural Materials: Properties, Misrostructure and Processing,2006(1/2):157-161.
[28] Barbara Malic;Iulian Boerasu;Mira Mandeljc .Processing and dielectric characterization of Ba_(0.3)Sr_(0.7)TiO_3 thin films on alumina substrates[J].Journal of the European Ceramic Society,2007(8/9):2945-2948.
[29] Sandip Haider;Ulrich Boettger;Theodor Schneller;Rainer Waser;Oliver Baldus;Philipp Jacobs;Martin Wehner .Laser annealing of BST thin films with reduced cracking at an elevated temperature[J].Materials Science & Engineering, B. Solid-State Materials for Advanced Technology,2006(1/3):235-240.
[30] T. Matsumoto;H. Saito;K. Numata;S. Miyake .Effect of millimeter-wave annealing on (Ba,Sr)TiO_3 films prepared by chemical solution deposition[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2005(1/2):101-107.
上一张 下一张
上一张 下一张
计量
  • 下载量()
  • 访问量()
作者相关
文章评分
  • 您的评分：
  • 1
    0%
  • 2
    0%
  • 3
    0%
  • 4
    0%
  • 5
    0%

版权所有©2010中国科学院金属研究所中国科技出版传媒股份有限公司

本系统由北京仁和汇智信息技术有限公司设计开发

技术支持：info@rhhz.net