采用高频等离子体化学气相沉积法(RF-PCVD)法,以TiCl4 + O2为反应体系,制备出了纳米级的TiO2粉体.TEM、XRD等结果表明,颗粒基本呈球形,粒径小于100 nm.从模拟结果和实验结果可以看出:随着汽化温度升高,停留时间延长,二氧化钛颗粒粒度逐渐增大,同时金红石含量也增加.加入AlCl3晶型转化剂,有助于锐钛相向金红石相转化.
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