综述了PZT薄膜的制备方法,从电极、微观结构和化学成分、生长方向、多层膜结构以及机械应力对性能的影响五个方面介绍了PZT薄膜的研究进展.提出了PZT薄膜存在的主要问题和发展方向.
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