用X-射线衍射(XRD)、扫描电镜(SEM)、透射电镜(TEM)和图像分析等分析手段,对激光诱导六甲基乙硅胺烷加氨气气相合成纳米陶瓷粉进行了结构分析及表征.结果表明:利用激光诱导六甲基乙硅胺烷合成出了理想的纳米陶瓷粉,实验制备的粉体由非晶态相和少量晶态相组成,颗粒形状规则呈球形;其微粒粒径多为10～20 nm范围,大部分分散性较好,粉中无游离的硅生成;主要相为非晶态结构的SiC和Si3N4组成,少量晶态相为α-SiC、β-SiC和Si3N4.在可控制备工艺条件下能够合成理想的非晶纳米SiC粉体.
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