从单晶和多晶硅切割废料浆中综合回收高纯硅、聚乙二醇和碳化硅,对减少环境污染、提高资源利用率有一定意义,特别是如能将切割料浆中最有价值的高纯硅得以回收并再用于制造太阳能电池,这对缓解我国太阳能多晶硅的紧缺、减少多晶硅的进口量有重要意义和商业价值.本文简述了单晶硅和多晶硅的生产概况及其切割工艺,重点阐述了国内外切割料浆的回收进展,综合了国内外现有的回收专利技术,将回收工艺概括为固液分离和固体提纯两个主要步骤,并对每个步骤所采用的方法进行了归纳和分类,以供相关企业参考.同时,本文也介绍了国内现有的切割料浆回收企业的概况,以及目前从切割料浆中回收高纯硅的研究进展.
参考文献
[1] | Braga AFB;Moreira SP;Zampieri PR;Bacchin JMG;Mei PR .New processes for the production of solar-grade polycrystalline[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2008(4):418-424. |
[2] | Goetzberger A.;Hebling C. .Photovoltaic materials, past, present, future[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2000(1/2):1-19. |
[3] | Sarti D;Einhaus R .Silicon feed stock for the polycrystalline photovoltaic industry[J].Solar Energy Materials and Solar Cells,2002,72:1272-1280. |
[4] | 杨德仁.太阳能电池材料(Yang De-ren.Solar cell materials[M].BeiJing:Chemical Industry Press,2006:10-28)[M].北京:化学工业出版社,2006:10-28. |
[5] | 沈辉,闻立时.简论发展我国太阳电池及多晶硅产业[J].科技导报,2006(06):8-10. |
[6] | 黄锋,陈瑞润,郭景杰,丁宏升,毕维生,傅恒志.太阳能电池用硅材料的研究现状与发展趋势[J].特种铸造及有色合金,2008(12):925-930. |
[7] | 梁骏吾.光伏产业面临多晶硅瓶颈及对策[J].科技导报,2006(06):5-7. |
[8] | 马文会,戴永年,杨斌,刘大春,王华.太阳能级硅制备新技术研究进展[J].新材料产业,2006(10):12-16. |
[9] | Rousseau S;Benmansour M;Morvan D;Amouroux J .Purification of MG silicon by thermal plasma process coupled to DC bias of the liquid bath[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2007(20):1906-1915. |
[10] | Muller A;Ghosh M .Silicon for photovoltaic applications[J].Materials Science and Engineering,2006,7:1-6. |
[11] | Morita K;Miki T.Thermodynamics of solar grade silicon refining[J].Intermetallics,2003(11):1111-1116. |
[12] | Khattak C P;Joyce D B;Schmid F.Production of low-cost solar grade(SOG) silicon feedstock[A].New Orleans,2002:364-367. |
[13] | Sumeet Bhagavat;Imin Kao .Theoretical analysis on the effects of crystal anisotropy on wiresawing process and application to wafer slicing[J].International Journal of Machine Tools & Manufacture: Design, research and application,2006(5):531-541. |
[14] | Peter O. Hahn .The 300 mm silicon wafer -- a cost and technology challenge[J].Microelectronic engineering,2001(1/2):3-13. |
[15] | 黎寿山,秦丹丹,辛玲,王海龙,张锐,范文捷,刘芳.碳化硅微粉应用新领域--半导体线切割[J].佛山陶瓷,2005(02):31-33. |
[16] | 解振华,魏昕,黄蕊慰,熊伟.半导体晶片的金刚石工具切割技术[J].金刚石与磨料磨具工程,2004(01):10-14. |
[17] | Zavatttari C;Fragiacomo G .Method for the separation,regeneration and reuse of the exhausted glycol-based slurry[P].US,6231628Bl,2001. |
[18] | Fragiacomo G .Process and apparatus for treating exhausted slurries for the recovery of their reusable components[P].W0,137098A1,2006. |
[19] | Zavatttari C;Fragiacomo G;Portaluppi E .Method for treating an exhausted glycol-based slurry[P].US,722334482,2007. |
[20] | 周寿赠;周正;曹孜 .单晶与多晶硅线切割用砂浆回收技术[P].中国,200710117665.0,2008. |
[21] | 金柏林;陈钧;陈丕烈 .单晶硅切割废液的处理回收方法[P].中国,200610029378.X,2008. |
[22] | 张捷平 .碳化硅微粉回收的方法[P].中国,200610058746.3,2007. |
[23] | 杨建锋;高积强;陈畅 等.一种从切割废砂浆中回收硅粉和碳化硅粉的方法[P].中国,200710018636.9,2009. |
[24] | 奚西峰;宋涵 .一种硅晶圆线切割废砂浆中聚乙二醇和碳化硅的回收方法[P].中国,200810232782.6,2009. |
[25] | 贺高红;刘旭东 .膜法回收高粘度硅切割液的研究(He Gao-hong,Liu Xu-dong.Study on the recovery of highly viscous lubricating liquid from silicon cutting slurry by membrane method[D].Daliang:Dalian University of Technology,2009.)[D].大连:大连理工大学,2009. |
[26] | Wang T Y;Lin Y C;Tai C Y et al.Lan.A novel approach for recycling of kerf loss silicon from cutting slurry waste for solar cell applications[J].Iournal of Crystal Growth,2008,310:3403-3406. |
[27] | Yung-Fu Wu;Yuan-Ming Chen .Separation of silicon and silicon carbide using an electrical field[J].Separation and Purification Technology,2009(1):70-74. |
[28] | 郭菁;邢鹏飞;韩志彪.真空下用镁-锌合金熔融从提纯工业硅粉的研究[A].北京:电子工业出版社,2009:321-324. |
[29] | 邢鹏飞;王耀彬;郭菁 等.从单/多晶硅切割料浆中回收太阳能级多晶硅的方法[P].中国,200910187695.8,2009. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%