本文介绍了金属诱导晶化非晶态硅制备多晶硅薄膜的新方法,综述了制备金属/非晶态硅复合薄膜的各种方法与晶化结果,着重介绍了金属低温诱导的机理及其在器件应用方面的可行性.
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