本文采用非平衡磁控溅射及等离子体源离子混合注入方法在奥氏体不锈钢1Cr18N9Ti基体上制备N/TiN/Ti(N,C)/DLC梯度涂层.采用原子力显微镜(AFM)及喇曼光谱等手段观察分析梯度膜的显微组织与相组成,同时采用了纳米压入技术评定膜层的力学性能.实验结果表明,采用此方法制备的金刚石膜组织致密,性能良好.
参考文献
| [1] | E W Roberts.Space Tribology Handbook[M].AEA Technoloyg plc,1997:972. |
| [2] | M Ramsteiner;J Wanger .Diamond-like carbon-conated Ti6A14V:influence of the coating thickness on the structure and the abrasive wear resistance[J].Applied Physics Letters,1987,51:1355-1367. |
| [3] | D Beeman;J.Sivlevmann;R.Lynds;M.R.Anderson .Measurement of fractrue toughness of ultra-thin amorphous carbon films[J].Physical Review,1984,B30:870-878. |
| [4] | A Karimi;O.R.Shojaei;T.Kruml;J.L.Martin .Characterisation of TiN thin films using the bulge test and the nanoindentation technique[J].Thin Solid Films,1997,308-309:308-309:334-339. |
| [5] | W C Oliver;G M Pharr.Dependence of microstructure and nanomechanical properties of amorphous carbon nitride thin films on vacuum annealing[J].Journal of Materials Research,1992(07):1564-1572. |
| [6] | J Robertson .Formation of amorphous carbon thin films[J].Diamond and Related Materials,1992,1:397-408. |
| [7] | Mingwu Bai;Koji Kato;Noritsugu Umehara;Yoshihiko Miyake;Junguo Xu;Hiromitsu Tokisue .Dependence of microstructure and nanomechanical properties of amorphous carbon nitride thin films on vacuum annealing[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(1/2):170-178. |
| [8] | Qi Jun;Luo Jianbin;Wen Shizhu;WangJing LiWenzhi.Mechnaical and tribological properties of non-hydrogenated DLC films synthesized by IBAD[J].Surface and Coatings Technology,2000:128-129,324-328. |
| [9] | S.Suresh;A.E.Glannakopoulos .A new method for estimating residual stresses by instrumented sharp indentation[J].Acta materialia,1998(16):5755-5768. |
| [10] | P Counderic;Y.Catherine .Structure and physical properties of plasma-grwn amorphous hydrogenated carbon films[J].THIN SOLID FILMS,1987,146:93-107. |
| [11] | Niranjan Gopinathan;Carolyn Robinson;Francis Ryan .Characterization and properties of diamond-like carbon films for magnetic recording application[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1999(0):401-405. |
| [12] | S. Muhl;E. Camps;L. Escobar-Alarcon .DLC films prepared by electron evaporation of graphite in an ECR plasma[J].Diamond and Related Materials,2001(3-7):915-919. |
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