使用CaF2,Y2O3和Li2CO3做添加剂,在1650℃的低温下制备出热导率高于170W/m@K的AlN陶瓷,通过使用SEM,TEM和XRD研究了AlN陶瓷在烧结过程中微结构与晶格参数的变化,并讨论了其对热导率的影响.研究发现,当使用CaF2-Y2O3做添加剂时,液相对晶粒浸润性较差,不利于AlN晶格的纯化,AlN热导率的增加主要来自于致密度的提高.而Li2O的加入则改善了液相与AlN晶粒的浸润性,从而促进了AlN晶格的纯化,有利于获得较高的热导率.
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