采用Sol-Gel工艺在普通载玻片上制备出C轴择优取向性、高可见光透过率以及高电导率的Al3+离子掺杂的ZnO透明导电薄膜.利用SEM、XRD等分析手段对薄膜进行了表征.研究结果表明:所制备的薄膜为纤锌矿型结构,表面平整、致密.通过标准四探针法及UVS透射光谱详细研究了Al3+离子掺杂的ZnO薄膜的电学与光学性能.实验发现,当Al3+离子掺杂浓度为0.8%时,前处理温度为400℃,退火温度为550℃,真空退火温度为550℃时,薄膜具有较好的导电性,电阻率为3.03× 10-3Ω@cm,其在可见光区的透过率超过80%.
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