采用电化学沉积方法,甲醇有机溶剂作碳源,在直流电源作用下在单晶硅表面沉积得到碳薄膜.薄膜不溶于苯、丙酮等有机溶剂,具有较高的硬度(16GPa左右),用AFM、Raman和FTIR分析手段对该薄膜表面形貌和结构进行表征,Raman和FTIR结果表明电化学沉积得到的是含氢的类金刚石碳薄膜.通过研究样品薄膜的XPS和XAES谱图特征,进一步证实薄膜是DLC薄膜,并用线性插入法估算出样品薄膜中SP3的相对含量为60%,同时推测了电化学沉积DLC薄膜的生长机理.
参考文献
| [1] | Namba Y .[J].Journal of Vacuum Science and Technology A-Vacuum Surfaces and Films,1992,10:3368-3370. |
| [2] | Wang Hao;Shen Ming-Rong;Ning Zhao yuan et al.[J].Applied Physics Letters,1996,69:1074-1076. |
| [3] | Wang Hao;Shen Ming Rong;Ning Zhao yuan et al.[J].Thin Solid Films,1997,293:87-90. |
| [4] | Bhushan B;Kellock A;Cho Nam Hee.[J].Journal of Materials Research,1992(07):404-410. |
| [5] | Ham M;Lou K .[J].Journal of Vacuum Science and Technology A-Vacuum Surfaces and Films,1990,A(08):2143-214. |
| [6] | Dishler B.Amorphous hydrogenated carbon films[A].Les Editions de Physique,1987:189. |
| [7] | Legrice Y M;Buehler E;Nemanich R et al.[J].Materials Research Society Symposium Proceedings,162:262-272. |
| [8] | Yusuke Taki;Osamu Takai .[J].Thin Solid Films,1998,316:45-50. |
| [9] | Leung T Y;Man W F et al.[J].Journal of Non-Crystalline Solids,1999,254:156-160. |
| [10] | Moulder J F;Stickle W F;PSobol P E.Handbook of X-ray photoeletron Spectroscopy[M].Prairie,MN,:Perkin-Elmer,1992:225. |
| [11] | Lascovich J C;Giorgi R;Scaglione S .[J].Applied Surface Science,1991,47:17-21. |
| [12] | Ohmura K.;Shirakawa H.;Kijima M. .SYNTHESIS OF CONDUCTING POLYMERS WITH CONJUGATED CARBON-CARBON TRIPLE BONDS BY ELECTROCHEMICAL CONDENSATION OF ACETYLENE DERIVATIVES CATALYZED BY COPPER COMPLEX[J].Synthetic Metals,1997(1/3):417-418. |
| [13] | Mizokawa Y;Miyasato T;Nakamura S et al.[J].Surface Science Spectra,1987,182:431-438. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%