本文采用低温常压CVD方法制备铝基SiOx陶瓷膜层.以黄铜为对磨材料,使用销-盘式磨损试验机对比研究纯铝表面与SiOx膜层的滑动磨损性能,通过SEM分析磨损的表面形貌并分析其磨损机理.结果表明纯铝表面发生粘着磨损,存在大量塑性变形和折叠,导致片状脱落,磨损率高;SiOx薄膜硬度较高,存在孔隙,表面发生塑性变形、崩塌和磨粒磨损;因薄膜孔隙具有储存润滑剂(水)的作用,磨损率明显低于对比纯铝样品;随沉积时间增加,SiOx膜层变厚,承载能力提高,磨损量减小.
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