通过锌膜在金属锌熔点以上的温度退火氧化的方法制备ZnO薄膜,研究了氧气压力对ZnO薄膜发光性能的影响.ZnO薄膜的室温光致发光谱是由发光中心在413nm～424nm处的单一紫光组成.随着氧气压力的增加,紫光的强度增加并且发光中心由424nm偏移到413nm.在低氧气压力下(50 Pa～500Pa),紫光的发射归因于电子从价带到锌间隙原子(Zni)之间的跃迁.在高氧气压力下(5000Pa～23000Pa),锌间隙原子(Zni)和锌空位(VZn)缺陷都和紫光发射有关.
参考文献
| [1] | L I Berger.Semiconductor Materials[M].New York:CRC Press,1997 |
| [2] | Aishi Yamamoto;Kensuke Miyajima;Takenari Goto;Hang Ju Ko;Takafumi Yao .Biexciton luminescence in high-quality ZnO epitaxial thin films[J].Journal of Applied Physics,2001(10):4973-4976. |
| [3] | Y M Sun .[D].合肥:中国科学技术大学,2000. |
| [4] | Kashiwaba Y.;Sugawara K.;Haga K.;Watanabe H.;Zhang BP.;Segawa Y. .Characteristics of c-axis oriented large grain ZnO films prepared by low-pressure MO-CVD method[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2002(1):87-90. |
| [5] | H. J. Ko;Y. F. Chen;Z. Zhu .Photoluminescence properties of ZnO epilayers grown on CaF_(2)(111) by plasma assisted molecular beam epitaxy[J].Applied physics letters,2000(14):1905-1907. |
| [6] | Y. Natsume;H. Sakata .Zinc oxide films prepared by sol-gel spin-coating[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(1/2):30-36. |
| [7] | K K Kim;J H Song;H J Jung;W.K.Choi .The grain size effects on the photoluninescence of ZnO/α-Al2 O3 grown by radio -frequency magnetron sputtering[J].Journal of Applied Physics,2000,87(08):3573-3575. |
| [8] | B. J. Jin;S. Im;S. Y. Lee .Violet and UV luminescence emitted from ZnO thin films grown on sapphire by pulsed laser deposition[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(1/2):107-110. |
| [9] | S.J. Chen;Y.C. Lu;J.G. Ma .High-quality ZnO thin films prepared by two-step thermal oxidation of the metallic Zn[J].Journal of Crystal Growth,2002(3/4):467-472. |
| [10] | Photoluminescence dependence of ZnO films grown on Si(100) by radio-frequency magnetron sputtering on the growth ambient[J].Applied physics letters,2003(16):2625-2627. |
| [11] | Wang QP.;Zhang DH.;Xue ZY.;Hao XT. .Violet luminescence emitted from ZnO films deposited on Si substrate by rf magnetron sputtering[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2002(1/4):123-128. |
| [12] | B. J. Jin;S. Im;S. Y. Lee .Violet and UV luminescence emitted from ZnO thin films grown on sapphire by pulsed laser deposition[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(1/2):107-110. |
| [13] | B D Cullity.Elements of X-Ray Diffractions[M].Addition-Wesley,Reading,MA,1978:102. |
| [14] | Z X Fu;C G X Guo;B X Lin;G.H.Liao .Cathodoluminescence of ZnO films[J].Chin Phys Society,1998,15:457-459. |
| [15] | Bixia Lin;Zhuxi Fu;Yunbo Jia .Green luminescent center in undoped zinc oxide films deposited on silicon substrates[J].Applied physics letters,2001(7):943-945. |
| [16] | Sang Sub Kim;Byung-Teak Lee .Effects of oxygen pressure on the growth of pulsed laser deposited ZnO films on Si(001)[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2004(2):307-312. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%