采用溶胶-凝胶法(sol-gel)制备技术制作了Pb(Zr,Ti)O3(PZT)压电薄膜,并以PZT薄膜为驱动制作了微泵.采用了V型微阀的微泵主要利用PZT的压电效应.针对微泵的关键结构--复合驱动膜,探索了一种Si/SiO2/Ti/Au/PZT/Cr/Au多层驱动膜结构制备方法,解决了在硅基底上制备PZT薄膜的问题,同时探讨并解决了硅各向异性刻蚀微泵的微驱动腔、单向阀的工艺问题,并通过SEM照片对V型阀和多层驱动膜进行了表征.研究结果表明,采用MEMS技术成功地完成了微驱动器的研制,得到的驱动腔硅杯平坦均匀.在V型阀微泵整体设计中需要的硅片数目少,降低了器件的复杂性,可以满足功耗低、小型化和批量生产的要求.
Piezoelectrically driven micropump using Pb (Zr,Ti)O3 (PZT) film has been successfully fabricated by Sol-Gel techniques. The PZT film with piezoelectric response was used to fabricate V type valve micropump. The key structure of micropump is Si/SiO2/Ti/Au/PZT/Cr/Au film, which is multi-layer driving membrane structure. The questions of PZT film deposited on silicon substrate are solved by the preparation of multi-layer driving membrane. The fabrication of the pump cavity and one-way valve by anisotropic etching are developed and investigated. The SEM photographs of V type valve and XRD analysis for the multi-layer driving membrane are given. The results show that it is successful to fabricate the micropump with MEMS technology. The pump cavity is flat and uniform. The design of V type valve well meets the demand of low power dissipation, minimizing scale and mass batch production, because of the simplicity in structure and small size.
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