红外减反射保护膜具有特定的厚度要求,如能进一步减小无氢类金刚石膜(DLC)的光学吸收,就能使其在较大厚度时不过分损失光通量而得以广泛应用.从这点来讲,无氢类金刚石膜是一种极具开发潜力的材料.本文采用非平衡磁控溅射技术(UBMS)制备了无氢类金刚石膜,并研究了其厚度均匀性.研究结果表明:该非平衡磁控溅射装置有能力获得大于φ150 mm的均匀性范围.对DLC膜红外透射谱的分析表明,分别在Si和Ge基底表面单面制备的DLC薄膜,其峰值透射率在波数2983/cm时分别为68.83%和63.05%,这一结果接近无吸收碳材料理论上所能达到的值.同时,在5000到800/cm范围内,未发现明显的吸收峰.这些优良的光学特性表明,采用非平衡磁控溅射技术制备的无氢DLC膜可以作为窗口的红外增透保护膜使用.
The hydrogen-free diamond-like carbon (DLC) films are potential materials to be used as infrared anti-reflection protective coatings if their optical absorption can be reduced to get relatively thick films needed. In this study, hydrogen-free DLC films were deposited in an unbalanced magnetron sputtering (UBMS) system. The results of film thickness uniformity showed that this system is capable of depositing uniform films larger than 150 mm in diameter. The infrared transmission spectra of DLC films indicating that transparent films were obtained in the infrared region for the single side DLC coated on the silicon and germanium substrates, and about 68.83% and 63.05% transmittance were achieved respectively at the wave number of 2983/cm, close to theoretical value for non-absorption carbon material. No obvious absorption peaks were found between 5000 and 800 /cm. These excellent characteristics show that the hydrogen-free DLC films prepared in the UBMS system were suitable for infrared transmission enhancement applications.
参考文献
| [1] | J Robertson .[J].Materials Science and Engineering R:Reports,2002,37:129-281. |
| [2] | Sudheer Kumar;C M S Rauthan et al.[J].Vacuum,2001,63(03):433-439. |
| [3] | T.V.Semikina;A.N.Shmyryeva .Optical, anti-reflective and protective properties of diamond and diamond-like carbon films[J].Diamond and Related Materials,2002(7):1329-1331. |
| [4] | N. V. Novikov;A. G. Gontar;S. I. Khandozhko;A. M. Kutsay;V. N. Tkach;V. Yu. Gorokhov;G. M.Belitsky;A. V. Vasin .Protective diamond-like coatings for optical materials and electronic devices[J].Diamond and Related Materials,2000(3-6):792-795. |
| [5] | O.M. Kutsay;A.G. Gontar;N.V. Novikov .Diamond-like carbon films in multilayered interference coatings for IR optical elements[J].Diamond and Related Materials,2001(9-10):1846-1849. |
| [6] | G F Zhang;X Zheng .[J].Surface and Coatings Technology,1996,82(1-2):110-113. |
| [7] | M. Pandey;D. Bhatacharyya;D.S. Patil .Structural and optical properties of diamond like carbon films[J].Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics,2005(1/2):296-302. |
| [8] | M. Veres;M. Koos;I. Pocsik .IR study of the formation process of polymeric hydrogenated amorphous carbon film[J].Diamond and Related Materials,2002(3-6):1110-1114. |
| [9] | N. A. Sanchez;C. Rincon;G. Zambrano;H. Galindo;P. Prieto .Characterization of diamond-like carbon (DLC) thin films prepared by r.f. magnetron sputtering[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(1/2):247-250. |
| [10] | H Inaba;S Fujimaki et al.[J].Vacuum,2002,66(3-4):487-493. |
| [11] | Zs. Geretovszky;T. Szoerenyi .Compositional and thickness distribution of carbon nitride films grown by PLD in the target plane[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2004(4):172-176. |
| [12] | I. Ahmad;P. D. Maguire;P. Lemoine .Deposition of carbon films onto metal and silicon substrates by filtered cathodic vacuum arc, plasma enhanced CVD and unbalanced magnetron sputtering[J].Diamond and Related Materials,2004(4/8):1346-1349. |
| [13] | D R Mckenzie;Y Yin et al.[J].Journal of Non Crystalline Solids,1993,164-166:1101-1106. |
| [14] | Manoj Komath G;Mohan Rao et al.[J].Vacuum,1999,52(03):307-311. |
| [15] | J Musil .[J].Surface and Coatings Technology,1998,100-101:280-286. |
| [16] | J Musil;S Kadlec et al.[J].Surface and Coatings Technology,1990,43-44:259-269. |
| [17] | M. Gioti;S. Logothetidis .Optical properties and new carbon forms of sputtered amorphous carbon films[J].Diamond and Related Materials,1999(2/5):446-450. |
| [18] | A. Hu;I. Alkhesho;H. Zhou .Optical and microstructural properties of diamond-like carbon films grown by pulsed laser deposition[J].Diamond and Related Materials,2007(1):149-154. |
| [19] | M. Smietana;J. Szmidt;M.L. Korwin-Pawlowski .Application of diamond-like carbon films in optical fibre sensors based on long-period gratings[J].Diamond and Related Materials,2007(4/7):1374-1377. |
| [20] | 徐均琪,杭凌侠,蔡长龙.磁控溅射离子束流密度的研究[J].真空科学与技术学报,2004(01):74-76. |
| [21] | 徐均琪,杭凌侠,惠迎雪.非平衡磁控溅射类金刚石薄膜的特性[J].真空科学与技术学报,2005(02):134-137,141. |
| [22] | Nakano T;Baba S .Gas pressure effects on thickness uniformity and circumvented deposition during sputter deposition process[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2006(7):647-649. |
| [23] | Chunlin Fu;Chuanren Yang et al.[J].Surface and Coatings Technology,2006,200(12-13):3687-3689. |
| [24] | Z Yin;Z Akkerman et al.[J].Diamond and Related Materials,1997,6(01):153-158. |
| [25] | H A Macleon.Thin-film Optical Filters[M].Institute of Physics Publishing,Bristol,2001:12-89. |
| [26] | Hang LX;Yin Y;Xu JQ .Optimisation of diamond-like carbon films by unbalanced magnetron sputtering for infrared transmission enhancement[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2006(1):357-361. |
- 下载量()
- 访问量()
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%