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中国材料进展, 2007, 26(6): 11-17. doi: 10.3969/j.issn.1674-3962.2007.06.003

硅纳米线的制备技术

裴立宅 1,

1.安徽工业大学,安徽,马鞍山,243002

关键词： 硅纳米线 , 激光烧蚀法 , 热蒸发法 , 模板法 , 生长机理

Preparation Methods of Silicon Nanowires

硅纳米线作为一种新型的一维纳米材料,在纳米电子器件、光电器件及集成电路方面具有很好的应用前景.介绍了硅纳米线在制备方面的国内外研究现状与进展,重点讨论了基于金属催化气-液-固(VLS)生长机理、氧化物辅助生长机理的硅纳米线制备及模板法等制备硅纳米线的研究成果、特点及生长机理.与金属催化VLS生长机理相比,氧化物辅助生长硅纳米线不需要金属催化剂,能避免金属污染,保证了硅纳米线的纯度,因而是今后深入研究的方向.

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