简单介绍了聚焦离子束（ FIB）的历史和工作原理，以及将离子束和电子束合为一体的双束系统。具体讨论了双束系统上的主要功能，如离子束镜筒、气体注入系统（ GIS）、超高分辨率的扫描电镜镜筒及将离子束和电子束合为一体的独特优势。例举了双束系统的一系列应用，如制作纳米图形用的多种加工方法，气体注入系统在制作纳米图形中的应用，透射电镜及原子探针的样品制备，三维形貌表征，三维能谱成分表征，三维 EBSD 晶体位相表征和电路修补。详细介绍了这些相关应用的发展现状及特点，比较了各种应用的优缺点。文章还介绍了在中国科研领域双束系统的应用状况及中国科研工作者利用双束系统获得的重要成果。
The history of Focused Ion Beam ( FIB) and its working principle are briefly reviewed .DualBeam System, namely combined FIB and SEM into one system , is introduced.Main features on such DualBeamsystem and the trend of its development are discussed in more details, including FIB column, gas injection system (GIS), ultra-high resolution SEM column and the advantages of combining FIB column with SEM column into one system .Main applications of such a DualBeam systemare discussed by examples , such as the various pattern generation techniques used in nano-prototyping, the use of GIS in nano-prototyping, sample preparation for transmission electron microscope as well as for atom probe , 3 dimensional (3D) characterization for morphology, 3D chemistry by EDS and 3D crystallography by EBSD, and circuit editing.The related application status and progress are introduced in details .The application status of Dualbeam in Chi-nese scientific research and the important progress by Chinese researchersare discussed briefly .
参考文献
| [1] | Reyntjens S.;Puers R. .A review of focused ion beam applications in microsystem technology[J].Journal of Micromechanics and Microengineering,2001(4):287-300. |
| [2] | Volkert C A;Minor A M.Focused Ion Beam：Microscopy and Micromachining[J].MRS Bulletin,2007(32):389-391. |
| [3] | Levi-Setti R .Proton Scanning Microscopy:Feasibility and Prom-ise[J].Scanning Electron Microscopy,1974,6(12):125-126. |
| [4] | Escovitz W H;Fox T R;Levi-Setti R .Scanning Transmission Ion Microscope with a Field Ion Source (Ion Optics/Field Ionization/Microradiography)[J].Proceedings of the National Academy of Sciences(USA),1975,72(05):1826-1828. |
| [5] | Orloff J;Swanson L .Study of a Field-Ionization Source for Mi-croprobe Applications[J].Journal of Vacuum Science and Technology,1975,12(06):1209. |
| [6] | Seliger R;Ward J W;Wang V et al.A High-Intensity Scanning Ion Probe with Submicrometer Spot Size[J].Applied Physics Letters,1979,34(05):310-311. |
| [7] | Xu Z W;Fang F Z;Zhang S J et al.Fabrication of Micro DOE Using Micro Tools Shaped with Focused Ion Beam[J].Optics Ex-press,2010,18(08):8025-8028. |
| [8] | F. Z. Fang;Z. W. Xu;X. T. Hu;C. T. Wang;X. G. Luo;Y. Q. Fu .Nano-photomask fabrication using focused ion beam direct writing[J].CIRP Annals,2010(1 CD/ROM):543-546. |
| [9] | Xia L;Wu W;Xu J.3D Nanohelix Fabrication and 3D Nanometer Assembly by Focused Ion Beam Stress-Introducing Technique[A].Istanbul:Institute of Electrical and Electronics Engineers (IEEE),2006:118-121. |
| [10] | Xu Z W;Fang F Z;Fu Y Q.Fabrication of Micro/Nano-Structures Using Focused Ion Beam Implantation and XeF2 Gas-Assisted Etching[J].J Micromechanics and Microengineering,2009(19):54003-54004. |
| [11] | Li Guan;Kaiwu Peng;Yanlian Yang;Xiaohui Qiu;Chen Wang .The nanofabrication of polydimethylsiloxane using a focused ion beam[J].Nanotechnology,2009(14):1-5. |
| [12] | Liu H;Li T;Wang QJ;Zhu ZH;Wang SM;Li JQ;Zhu SN;Zhu YY;Zhang X .Extraordinary optical transmission induced by excitation of a magnetic plasmon propagation mode in a diatomic chain of slit-hole resonators[J].Physical review, B. Condensed matter and materials physics,2009(2):024304-1-024304-5-0. |
| [13] | Qiang Luo;A-Juan Cui;Yi-Guang Zhang;Chao Lu;Ai-Zi Jin;Hai-Fang Yang;Chang-Zhi Gu .Transport Comparison of Multiwall Carbon Nanotubes by Contacting Outer Shell and All Shells[J].Journal of nanoscience and nanotechnology,2010(11):7477-7480. |
| [14] | Randolph S J;Botman A;Toth M.Rapid Localized Deposition of High Purity Platinum by Spontaneous Reaction of Pt (PF3) 4 With XeF2 in a Scanning Electron Microscope[A].Spain,2012 |
| [15] | Botman A;Mulders JJL;Weemaes R;Mentink S .Purification of platinum and gold structures after electron-beam-induced deposition[J].Nanotechnology,2006(15):3779-3785. |
| [16] | Mackus A J M;Mulders J J L;Van De Sanden M C M.Local Deposition of High-Purity Pt Nanostructures by Combining Electron Beam Induced Deposition and Atomic Layer Deposition[J].Journal of Applied Physics,2010(107):116102-116103. |
| [17] | Adriaan J. M. Mackus;W. M. M. (Erwin) Kessels;J. J. L. (Hans) Mulders .Selective In-Situ Atomic Layer Deposition on Structures Created with EBID[J].Microscopy and Analysis. Asia-Pacific,2011(TN.84):5-8. |
| [18] | Lavrijsen R;Cordoba R;Schoenaker F J.Fe:O:C Grown by Focused-Electron-Beaminduced Deposition:Magnetic and Electric Properties[J].NANOTECHNOLOGY,2011(22):025302-025306. |
| [19] | Shan ZW;Li J;Cheng YQ;Minor AM;Asif SAS;Warren OL;Ma E .Plastic flow and failure resistance of metallic glass: Insight from in situ compression of nanopillars[J].Physical review, B. Condensed matter and materials physics,2008(15):155419-1-155419-6-0. |
| [20] | Shan Z W;Mishra R K;Syed Asif S A.Mechanical An-nealing and Source-Limited Deformation in Submicrometre-Di-ameter Ni Crystals[J].Nature Materials,2007(07):115-119. |
| [21] | Wu X;Sun L.Advanced Methodologies for Atomic-Scale Nanofabrication and Dynamic Characterization[A].Suzhou:Southeast Universi-ty,2013 |
| [22] | Xu H;Xia Y;Yin K.The Chemically Driven Phase Transformation in a Memristive Abacus Capable of Calculating Decimal Fractions[J].Scientific Reports,2013(03):1230. |
| [23] | Sichao Du;Timothy Burgess;Shyeh Tjing Loi.Full tip imaging in atom probe tomography[J].Ultramicroscopy,2013:96-101. |
| [24] | S. Rolling;W. Vandervorst .Failure mechanisms of silicon-based atom-probe tips[J].Ultramicroscopy,2009(5):486-491. |
| [25] | Menand A;Cadel E;Pareige C.Three-Dimensional A-tomic Scale Microscopy with the Atom Probe[J].Ultramicrosco-py,2009(78):63-66. |
| [26] | Miller M K;Cerezo A;Hetherington M G.Atom Probe Field Ion Microscopy[M].Oxford:Clarendon Press,1996:45-66. |
| [27] | Vurpillot F.;Bostel A. .The spatial resolution of 3D atom probe in the investigation of single-phase mateirals[J].Ultramicroscopy,2000(3-4):213-224. |
| [28] | F. Elfallagh;B.J. Inkson .3D analysis of crack morphologies in silicate glass using FIB tomography[J].Journal of the European Ceramic Society,2009(1):47-52. |
| [29] | Li, H.;Li, Y.;Lei, Z.;Wang, K.;Guo, A. .Transformation of odor selectivity from projection neurons to single mushroom body neurons mapped with dual-color calcium imaging[J].Proceedings of the National Academy of Sciences of the United States of America,2013(29):12084-12089. |
| [30] | Giannuzzi L A;Stevie F A;Giannuzzi.Introduction to Focused Ion Beams:Instrumentation,Theory,Techniques and Practice[M].New York:Springer-Verlag,2005:21-28. |
| [31] | Graham Knott;Herschel Marchman;David Wall;Ben Lich .Serial Section Scanning Electron Microscopy of Adult Brain Tissue Using Focused Ion Beam Milling[J].The Journal of Neuroscience: The Official Journal of the Society for Neuroscience,2008(12):2959-2964. |
| [32] | Ben Lich.The Future SEM Sees 3 Dimensions with “Thru-sight”:Bringing Deconvolution Techniques to the Electron Mi-croscope[A].Copenhagen:FEI Company,2013 |
| [33] | Ke Wang;Korrinn Strunk;Gongpu Zhao;Jennifer L Gray;Peijun Zhang .3D structure determination of native mammalian cells using cryo-FIB and cryo-electron tomography[J].Journal of Structural Biology,2012(2):318-326. |
| [34] | Scott K;Ritchie NW .Analysis of 3D elemental mapping artefacts in biological specimens using Monte Carlo simulation.[J].Journal of Microscopy,2009(2):331-339. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%